We studied low-temperature alumina (AlO x ) gate dielectrics by a simple spin-coating of home-made aluminum acetate hydroxide precursor (Al(OH)(C 2 H 3 O 2 ) 2 ) for low-voltage organic thin-film transistors (OTFTs). To improve the inorganic/organic interface, a thin PS polymer was introduced as interface modifier layer. Low leakage current of 7 9 10 -6 A/cm 2 and high dielectric constant of 5.8 were achieved for AlO x dielectrics at the low temperature of 200°C. The OTFT with 200°C annealed AlO x dielectrics can operate at the low voltage of 5 V. Moreover, the OTFT with 200°C annealed AlO x film realized a high charge carrier mobility of 0.46 cm 2 /Vs and high on/off ratio of 1.04 9 10 4 , comparable to the mobility of 0.51 cm 2 /Vs and on/off ratio of 2.53 9 10 4 for OTFT with 400°C annealed AlO x film. Our results suggested that simple low-temperature annealing can offer high-performance dielectric films for OTFTs, providing a promising approach for low-power organic electronics at a low cost.