Note: Laser-cut molybdenum grids for a retarding field energy analyzer

Landheer, Kees; Kobelev, Anton A.; Smirnov, Alexander; Bosman, Johan; Deelen, Sander; Rossewij, M.; Waal, A.C. de; Poulios, Ioannis; Benschop, A. F.; Schropp, R.E.I.; Rath, J.K.

doi:10.1063/1.4986229

Cited by 4 publications

(10 citation statements)

References 10 publications

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“…The grid-type RFEA provided similar energy distribution values with minor fluctuations despite the fact that the temperature and angular current density of the Schottky electron gun were changed. A possible explanation for this can be attributed to the sagging effect, which is caused by the formation of a nonuniform potential inside the grid of a typical grid-type energy analyzer (Landheer et al, 2017). In contrast, the pre-lens RFEA reveals that the energy distribution increases linearly from 1.7 to 2.68 eV in approximately 15 meV steps with each angular current density.…”

Section: Resultsmentioning

confidence: 99%

“…Therefore, the potential varies depending on the position ( r ) inside the retarding electrode. Regarding the grid electrodes used in conventional grid-type RFEAs, a potential difference occurs between the wire and the mesh center, and this phenomenon occurs in countless meshes (Landheer et al, 2017). This sagging effect generates a shift of the peak potential and causes a decrease in the resolution.…”

Section: Methodsmentioning

confidence: 99%

“…Typically, a retarding analyzer is utilized in various plasma physics studies such as those focusing on ion etching or atomic layer deposition in the semiconductor industry. With the analyzer being mounted on a low-earth-orbit satellite, it is easy to analyze the temperature and speed of ions in the ionized layer (Baloniak et al, 2010; Fanelli et al, 2015; Sharma et al, 2015; Landheer et al, 2017; Van De Ven et al, 2018).…”

Section: Introductionmentioning

confidence: 99%

“…The incident electrons can be partially absorbed by the grid electrodes before arriving collector. In addition, contaminants caused by the electron beam can accumulate on the grid wire, and the sagging effect caused by the nonuniform field inside each grid mesh potential can reduce the measurement precision of the energy distribution (Young, 1959; Landheer et al, 2017; Muro et al, 2017; Van De Ven et al, 2018).…”

Section: Introductionmentioning

confidence: 99%

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High-Performance Compact Pre-Lens Retarding Field Energy Analyzer for Energy Distribution Measurements of an Electron Gun

Lee

Hwang

Ogawa

et al. 2022

Microscopy and Microanalysis

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The energy distribution of an electron gun is one of the most important characteristics determining the performance of electron beam-based instruments, such as electron microscopes and electron energy loss spectroscopes. For accurate measurements of the energy distribution, this study presents a novel retarding field energy analyzer (RFEA) with the feature of an additional integrated pre-lens, which enables an adjustment of beam trajectory into the analyzer. The advantages of this analyzer are its compact size and simple electrode configuration. According to trajectory simulation theories, the optimum condition arises when the incident electron beam inside the RFEA is focused on the center of a retarding electrode. Comparing I–V curves depending on whether the pre-lens working or not, it is confirmed that the use of the pre-lens dramatically improves the energy resolution and efficiency of the signal acquisition process. The pre-lens RFEA was applied to characterize a Schottky electron gun under various temperatures and extraction voltages as operational conditions. When the tip temperature was increased by 50 K, we were able to measure an energy distribution broadening of 13.8 meV with the proposed pre-lens RFEA. The relative standard deviation of energy distribution was 0.7% for each working condition.

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Section: Resultsmentioning

confidence: 99%

Section: Methodsmentioning

confidence: 99%

Section: Introductionmentioning

confidence: 99%

Section: Introductionmentioning

confidence: 99%

See 2 more Smart Citations

High-Performance Compact Pre-Lens Retarding Field Energy Analyzer for Energy Distribution Measurements of an Electron Gun

Lee

Hwang

Ogawa

et al. 2022

Microscopy and Microanalysis

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show abstract

“…When re-designing the RFEA, one must consider the conditions in which it will operate. For a comprehensive review of previous designs and necessary design considerations for RFEAs, the reader is referred to the following [5][6][7][8][9][14][15][16][17][18][19][20][21]. These previous designs were made to be as compact as possible.…”

Section: Introductionmentioning

confidence: 99%

IEDF distortion and resolution considerations for RFEA operation at high voltages

Talley

Shannon

Chen³

et al. 2017

Plasma Sources Sci. Technol.

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Retarding field energy analyzers (RFEA) have been used extensively to measure the ion flux energy distribution function of plasmas. For consistency, the ion flux energy distribution function is referred to as the ion energy distribution function (IEDf) even though it more accurately represents the one-dimensional ion velocity distribution function. In the past, these devices have operated at voltages less than 1 kV. Higher operating voltages (>2 kV) are currently desired. For an RFEA to operate at these voltages, design changes are necessary that impact the energy resolution and cause space charge build-up. To investigate the effect the design changes have for a high voltage RFEA, electromagnetic simulations and particle-in-cell (PIC) simulations were used to analyze the electric field between the grids, the potential drop in the grid holes, and space charge build-up between the grids. Non-unique optimized dimensions for the RFEA increased the electric field uniformity. The optimization minimizes the electric field from distorting the IV curve or adversely affecting the energy resolution. It was found that a larger grid gap distance and smaller grid hole diameter decreases the potential drop in the grid holes improving energy resolution. IV curves from the PIC simulation were used to obtain space charge distorted IEDfs. The point at which space charge distorts the IV curve is dependent on the grid gap distance and incoming flux. Space charge build-up was found to only affect low energy ions which manifested by cutting off the low energy portion of the IEDf. To fix space charge distortions, the flux into the probe can be limited or it may be possible to account for the distortion when calculating the IEDf.

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Study and design of a lens-type retarding field energy analyzer without a grid electrode

et al. 2020

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Note: Laser-cut molybdenum grids for a retarding field energy analyzer

Cited by 4 publications

References 10 publications

High-Performance Compact Pre-Lens Retarding Field Energy Analyzer for Energy Distribution Measurements of an Electron Gun

High-Performance Compact Pre-Lens Retarding Field Energy Analyzer for Energy Distribution Measurements of an Electron Gun

IEDF distortion and resolution considerations for RFEA operation at high voltages

Study and design of a lens-type retarding field energy analyzer without a grid electrode

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