2013
DOI: 10.1117/1.jmm.12.1.013003
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Novel automated microassembly mechanism based on on-chip actuators

Abstract: The development of a novel automated microassembly mechanism based on on-chip actuators is described. The assembly mechanism utilizes repulsive-force actuators to flip surface-micromachined twodimensional structures out-of-plane and assemble them in a vertical position. The assembly mechanism is suitable for wafer-level multidevice batch assembly without external interference. Prototypes were fabricated using the PolyMUMPs surface micromachining technology, then tested. The strength of the assembled structures… Show more

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Cited by 3 publications
(2 citation statements)
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“…The test result shows that a rotation angle of 4.4° can be achieved at 200 V DC and there is more than 100% improvement compared to the non-optimized actuator presented in [97]. The application of using the rotary actuator in automated microassembly was presented in [106]. One important application of the repulsive-force actuators presented in [97], [105] is to drive a 2D scanning micromirror [107] which is shown in Fig.…”
Section: Electrostatic Repulsive-force Out-of-plane Actuatorsmentioning
confidence: 99%
“…The test result shows that a rotation angle of 4.4° can be achieved at 200 V DC and there is more than 100% improvement compared to the non-optimized actuator presented in [97]. The application of using the rotary actuator in automated microassembly was presented in [106]. One important application of the repulsive-force actuators presented in [97], [105] is to drive a 2D scanning micromirror [107] which is shown in Fig.…”
Section: Electrostatic Repulsive-force Out-of-plane Actuatorsmentioning
confidence: 99%
“…The test result shows that a rotation angle of 4.4° can be achieved at 200 V DC and there is more than 100% improvement compared to the non-optimized actuator presented in [97]. The application of using the rotary actuator in automated microassembly was presented in [106]. One important application of the repulsive-force actuators presented in [97], [105] is to drive a 2D scanning micromirror [107] which is shown in Fig.…”
Section: Electrostatic Repulsive-force Out-of-plane Actuatorsmentioning
confidence: 99%