Novel fabrication process for an array of elliptical zone plates by using direct laser lithography

Anh, Nguyen Nu Hoang; Kim, Young-Gwang; Rhee, Hyug-Gyo; Ghim, Young-Sik

doi:10.1007/s00170-019-04818-4

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Novel fabrication process for an array of elliptical zone plates by using direct laser lithography

Cited by 5 publications

References 14 publications

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Novel fabrication and designs for hybrid optical elements with wider angle field of view by using integrated direct laser lithographic system

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