Novel illumination apertures for resolution-enhanced technology and through-pitch critical dimension control

Huang, I. H.; Lin, Ling C.; Lin, Chin Lin

doi:10.1117/12.599559

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2013

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“…Thanks to such performance, an axicon lens plays a significant role in many optical systems [1][2][3][4][5]. Thanks to such performance, an axicon lens plays a significant role in many optical systems [1][2][3][4][5].…”

Section: Introductionmentioning

confidence: 99%

Optimization of thickness uniformity of optical coatings on a conical substrate in a planetary rotation system

et al. 2013

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For a coating machine with a planetary rotation system and counterrotating shadowing mask configuration, a shadowing mask was designed using a numerical optimization algorithm to control the thickness uniformity of optical coatings formed on conical substrate. Single-layer magnesium fluoride (MgF(2)) and antireflective (AR) coating at 193 nm were fabricated on a convex conical substrate holder (with diameter 225 mm, apex angle 140 deg, and height 41 mm) by thermal evaporation. Thickness distribution determined from the transmittance spectra of single-layer MgF(2) thin films on BK7 slices showed that uniformities better than 99.3% were experimentally achieved with the designed counterrotating shadowing mask. From the reflectance spectra, uniform optical performance was also obtained for the 193 nm AR coating deposited on fused-silica substrates.

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