2003
DOI: 10.1117/12.510965
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Novel manufacturing process of waveguide using selective photobleaching of polysilane films by UV light irradiation

Abstract: We have tried to develop the technology for selective bleaching of core patterns of waveguides on polysilane films by UV light irradiation without wet development and RIE process. Furthermore, we have examined heat treatment of films in order to make transmission loss low instead of introducing fluorine groups in the polymer structure which conventional polymeric material are applied. As a waveguide device, evaluation of low loss straight-line waveguides and multilayered laminating type waveguides at 850nm for… Show more

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Cited by 9 publications
(4 citation statements)
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“…Therefore, some polymer materials such as polyimide and poly silane are utilized for conventional polymer waveguides, despite having a slight yellow color. In fact, those waveguides exhibit low propagation loss at 850 nm [14]. On the other hand, the results shown in Fig.…”
Section: Propagation Lossmentioning
confidence: 81%
“…Therefore, some polymer materials such as polyimide and poly silane are utilized for conventional polymer waveguides, despite having a slight yellow color. In fact, those waveguides exhibit low propagation loss at 850 nm [14]. On the other hand, the results shown in Fig.…”
Section: Propagation Lossmentioning
confidence: 81%
“…Specifically, multimode polymer optical waveguides have been drawing much attention because of low material and processing costs with high productivity; polymer parallel multimode waveguides are also one of the feasible solutions for off-chip interconnections. Thus, various polymer waveguides have been proposed, so far [1][2][3]. In the case of the onboard interconnections, several centimeters of waveguides would be used, because of which lithography or imprinting processes have been widely adopted for polymer waveguides.…”
Section: Introductionmentioning
confidence: 99%
“…New acrylates, epoxies, polyimides, and polysilanes have been developed for fabricating PWG. [5][6][7][8][9] They are transparent to 850-nm-wavelength light for data transmission. However, they show some absorption of visible light, as shown in Fig.…”
mentioning
confidence: 99%