Novel Method for Electroless Etching of 6H–SiC

Károlyházy, Gyula; Beke, D.L.; Zalka, Dóra; Lenk, Sándor; Krafcsik, Olga H.; Gali, Ádám

doi:10.3390/nano10030538

Cited by 6 publications

(4 citation statements)

References 33 publications

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“…Most MAX phases can be etched with hydrofluoric acid at various temperatures to produce different MXenes, depending on the different HF parameters such as concentration and environmental conditions like room temperature (figures 3(a)-(d)) table 2 [70,84,[97][98][99][100]. HF has very high selectivity as an etchant, allowing it to selectively remove distinct kinds of SiC [101]. The etching conditions for the MAX phase containing Al vary based on different factors such as particle size, atomic bond, and structure of transition metal [102].…”

Section: Max Phase Etching By Hydrofluoric Acidmentioning

confidence: 99%

Recent progress in two dimensional Mxenes for photocatalysis: a critical review

et al. 2022

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Transition metal carbides and nitrides, generally known as MXenes have emerged as an alternative to improve photocatalytic performance in renewable energy and environmental remediation applications because of their high surface area, tunable chemistry, and easily adjustable elemental compositions. MXenes have many interlayer groups, surface group operations, and a flexible layer spacing that makes them ideal catalysts. Over 30 different members of the MXenes family have been explored and successfully utilized as catalysts. Particularly, MXenes have achieved success as a photocatalyst for carbon dioxide reduction, nitrogen fixation, hydrogen evolution, and photochemical degradation. The structure of MXenes and the presence of hydrophilic functional groups on the surface results in excellent photocatalytic hydrogen evolution. In addition, MXenes’ surface defects provide abundant CO2 adsorption sites. Moreover, their highly efficient catalytic oxidation activity is a result of their excellent two-dimensional nanomaterial structure and high-speed electron transport channels. This article, comprehensively discusses the structure, synthesis techniques, photocatalytic applications (i.e., H2 evolution, N2 fixation, CO2 reduction, and degradation of pollutants), and recyclability of MXenes. This review also critically evaluates the MXene-based heterostructure and composites photocatalyst synthesis process and their performance for organic pollutant degradation. Finally, a prospect for further research is presented in environmental and energy sciences.

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Section: Max Phase Etching By Hydrofluoric Acidmentioning

confidence: 99%

Recent progress in two dimensional Mxenes for photocatalysis: a critical review

et al. 2022

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“…Even though SiC is highly resistant to many etchants, [ 55 ] wet etching has enabled the fabrication of the smallest SiC particles to date, with diameters of 1–3 nm. [ 7,37,56 ] Different SiC polytypes and crystal facets show different etching rates, which have been employed to facilitate the etching process while controlling the shape and size of etched particles. [ 55,57 ] Compared to milling, the NPs created via etching are usually smaller (<10 nm) and have a much narrower size distribution.…”

Section: Sic Nanoparticlesmentioning

confidence: 99%

Fluorescent Silicon Carbide Nanoparticles

Vries

Sato

Ohshima

et al. 2021

Advanced Optical Materials

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Silicon carbide (SiC) is an indirect wide band gap semiconductor that is utilized in many industrial applications due to its extreme physical properties. SiC nanoparticles (NPs) exhibit a versatile surface chemistry, fluoresce from the ultraviolet to the near‐infrared spectral ranges, and their sizes can be tuned from one to hundreds of nanometers. Yet, fluorescent SiC NPs have received far less attention by the scientific community. This review summarizes the state‐of‐the‐art in fluorescent SiC NPs. Nanoparticle fabrication methods, characterization techniques, nanoparticle surface chemistry, and SiC NPs fluorescence properties are assessed in detail. Atomic defects and impurities in the SiC crystal lattice (so‐called color centers), surface‐induced fluorescence, quantum confinement, and band‐edge fluorescence are identified as the main sources of fluorescence in SiC NPs. While many color centers are reported in bulk SiC, only few are identified in SiC NPs and interface‐related defects remain poorly understood, creating enormous potential for scientific discovery. Finally, an overview of demonstrated and emerging potential applications of SiC NPs in the areas of bioimaging and quantum sensing is provided.

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“…At present, the oxidants used for CMP are usually hydrogen peroxide [5][6][7], hydrogen fluoride [8], potassium permanganate [9,10] and so on. There are many effective ways based on CMP to polish SiC, such as electrochemical mechanical polishing [11], chemical etching [12], etc. Su Jianxiu et al [13] studied the effects of pH value of polishing slurry composition, abrasive size, abrasive concentration, dispersant concentration, oxidant concentration and polishing process parameters on the material removal rate of SiC polished by alumina abrasive.…”

Section: Introductionmentioning

confidence: 99%

Investigation of the tribochemical reaction mechanism in dry-type CMP of 6H-SiC substrate

Zhang

et al. 2023

Surface Engineering

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In this paper, the tribochemical reaction mechanism between solid powder and 6H-SiC substrate was investigated. White light interferometer was used to detect surface roughness, FESEM was used to observe surface characteristics, EDS was used to detect surface elements and XRD was used to detect surface components. The tribochemical reaction mechanism of the reduced iron powder, anhydrous sodium carbonate and deionized water with 6H-SiC was analysed by the detection results. It is found that the reduced iron powder, anhydrous sodium carbonate and deionized water react with the 6H-SiC surface to form a soft interfacial transition layer which can be removed. The removal rate of the reduced iron powder is the highest at 191 nm h -1 . The surface quality decreases after polishing with the anhydrous sodium carbonate. The results of this study provide a new idea for the field of ultra-precision machining.

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Novel Method for Electroless Etching of 6H–SiC

Cited by 6 publications

References 33 publications

Recent progress in two dimensional Mxenes for photocatalysis: a critical review

Recent progress in two dimensional Mxenes for photocatalysis: a critical review

Fluorescent Silicon Carbide Nanoparticles

Investigation of the tribochemical reaction mechanism in dry-type CMP of 6H-SiC substrate

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