Novel multibridge-structured piezoelectric microdevice for scanning force microscopy

Abstract

In this article we report the structure and the microfabrication method of a novel micro-scanning force microscopy (SFM) device. It is a lead zirconate titanite (PZT) bimorph structure in the shape of a cantilever supported by bridges. Electric fields applied to the separated sections of the electrodes on the levers can induce lever deflection and actuate the tip in x, y, and z directions. The cantilever can vibrate and sense its own vibration amplitude to detect the surface topography in the cyclic contact SFM mode. In the fabrication process, the sol–gel method is modified for constructing high quality PZT films 3 μm thick. The single bridge device has shown microscopy sensitivity of 0.32 nA/nm in a vertical direction, with actuation sensitivities of 70–80 nm/V in a lateral direction. The multibridged structure has been proven to be effective in elevating the eigenfrequency, which is very important for improving the SPM data rate.

Preparation of ferroelectric ceramics in a film structure and their photovoltaic properties

“…Then the photovoltaic effect was estimated. The Si-substrate was prepared using the standard MEMS process in our group (Chu et al 2000;Matsumoto et al 1998;Schroth et al 1999). The PLZT film was formed onto the prepared Pt/Ti/SiO 2 /Si substrate.…”

“…These characteristics are useful and applicable to micro-electro-mechanical systems (MEMS) (Chu et al 2000;Matsumoto et al 1998;Schroth et al 1999). …”

Preparation of 0.055BaZrO3–0.935(K0.45Na0.5Li0.05)NbO3–0.01(Bi0.5Na0.5)TiO3 piezoelectric thin films from precursor solution by Pechini method

“…1 4 and CA solutions at 80 C until the solution became transparent, the Ti and Zr sources were obtained, respectively.…”

“…[1][2][3][4][5] However, because of environmental pollution caused by PbO contained in lead-based piezoelectric devices, research and development of high-performance lead-free piezoelectric materials have attracted much attention in recent years. 6 Potassium sodium niobate (KNN)-based lead-free piezoelectric materials with high piezoelectric properties have been widely reported.…”

Preparation and Size Control of Sodium Niobate Nanocube at Various Solvothermal Conditions

“…According to the theoretical calculations for BaTiO3/SrTiO3 superlattice, a local polarization was induced in SrTiO3 layers due to a lattice mismatch, and the polarization rotated from [001] to [110] as being apart from a BaTiO3/SrTiO3 interface [3,4]. Such a polarization rotation was reported as mechanism of lead zirconium titanate having a morphotropic phase boundary [15][16][17], and it contributes to large dielectric and piezoelectric properties. On the basis of the interface-induced polarization rotation [5,23], we have been trying to prepare 3-dimentional artificial superlattice accumulation with different perovskite oxides in order to enhance electrical properties of materials.…”