2011 International Reliability Physics Symposium 2011
DOI: 10.1109/irps.2011.5784548
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Novel negative Vt shift program disturb phenomena in 2X∼3X nm NAND flash memory cells

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Cited by 8 publications
(4 citation statements)
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“…Air-gap isolation as well as optimization of channel implant and STI depth uniformity [277] have been suggested as remedies. A related effect has been noted in [278], where a negative V T shift contribution was found and explained in terms of hot-hole injection from the STI edge to the control-gate [279,280]. All this suggests that the detailed leakage mechanisms affecting the boosted channel potential must be studied with extreme care [281].…”
Section: Program and Pass Disturbsmentioning
confidence: 75%
“…Air-gap isolation as well as optimization of channel implant and STI depth uniformity [277] have been suggested as remedies. A related effect has been noted in [278], where a negative V T shift contribution was found and explained in terms of hot-hole injection from the STI edge to the control-gate [279,280]. All this suggests that the detailed leakage mechanisms affecting the boosted channel potential must be studied with extreme care [281].…”
Section: Program and Pass Disturbsmentioning
confidence: 75%
“…The NAND Flash technology scaling has introduced additional disturbance mechanisms affecting the array reliability: the cell-to-cell interference [63], [64], [65], [66] and the Gate Induced Drain Leakage (GIDL) [67], [68]. The former issue is mainly caused by the FG coupling due to parasitic capacitances between cells, thus it is greatly affected by cell scaling, and is well known to widen the V T distributions by producing read errors.…”
Section: B Reliability Effectsmentioning
confidence: 99%
“…However, to implement this structure, there will be always uncertainty in the cell gate length and WL gap owing to process variations such as gate line edge roughness (LER), etch slope variation, and lithography resolution-induced variation, for example. [21][22][23][24][25][26][27] Therefore, this structure has an ONcell current and threshold voltage sensitive to cell gate length fluctuation, which might affect the threshold voltage distribution and memory performance adversely.…”
Section: Introductionmentioning
confidence: 99%