2004
DOI: 10.1143/jjap.43.2140
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Novel Silicon On Insulator Metal Oxide Semiconductor Field Effect Transistors with Buried Back Gate

Abstract: One of the most promising ways of realizing metal oxide semiconductor field effect transistors (MOSFETs) with high speed and ultralow power consumption is by varying the threshold voltage of fully depleted silicon on insulator (FD-SOI) MOSFETs by changing back gate bias. We have studied FD-SOI MOSFETs with buried back gate by experiment and simulation in order to realize both high-performance and low-voltage ULSIs. It was confirmed that the back gate is very effective not only for increasing the ON current in … Show more

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Cited by 7 publications
(4 citation statements)
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“…4) The bootstrap voltage has been changed from 1.2 to 1.5 V because of the simulated device model limitation. 12) From Fig. 7, it is shown that the write threshold bit line voltage was decreased from 17 to 28% under the 1.5 V bootstrap voltage.…”
Section: Simulation Results and Discussionmentioning
confidence: 95%
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“…4) The bootstrap voltage has been changed from 1.2 to 1.5 V because of the simulated device model limitation. 12) From Fig. 7, it is shown that the write threshold bit line voltage was decreased from 17 to 28% under the 1.5 V bootstrap voltage.…”
Section: Simulation Results and Discussionmentioning
confidence: 95%
“…The proposed writing scheme has been confirmed by circuit simulation using 0.1 mm silicon on insulator complementary metal-oxide-semiconductor (SOI CMOS) technology. 12) This SOI CMOS has a back gate to vary its threshold voltage; therefore. it is effective for low-power application.…”
Section: Simulation Results and Discussionmentioning
confidence: 99%
See 1 more Smart Citation
“…Therefore, FD SOI-MOSFET with a back gate has been extensively researched. [2][3][4] However, there are still many difficulties in terms of parasitic capacitance and the low controllability of threshold voltage because of substrate depletion and the low conductivity of the back gate region in a silicon-based ion-implanted back gate. These difficulties are also observed in the fabrication process of the device because back gate formation must be carefully optimized to reduce the influence of device characteristics causing diffusion in the SOI wafer due to the buried oxide (BOX) interface effects.…”
Section: Introductionmentioning
confidence: 99%