Nucleation and orientation of sol-gel pzt-films on pt electrodes

Willems, Gert; Wouters, Dirk J.; Maes, H.E.; Nouwen, R.

doi:10.1080/10584589708015693

Cited by 53 publications

(11 citation statements)

References 8 publications

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“…In the CSD method, hydrolysis and condensation rates are important factors that must be controlled to maximize solution stability. 20,21 In general, film orientation is an important factor for ferroelectric properties such as fatigue degradation, even if it is not predominant. [17][18][19] In this study, we used alkanolamine as a complexing agent for the PLZT solution.…”

Section: Methodsmentioning

confidence: 99%

Imprint and Fatigue Properties of Chemical Solution Derived Pb_1–-xLa_x(Zr_yTi_1–y)_1–x/4O₃ Thin Films

Kim

Hong

et al. 1999

J. Mater. Res.

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We have investigated the effect of oxygen vacancies on imprint and fatigue behavior of the PLZT thin films. It is found that the compensation of oxygen vacancies with various dopant concentrations and electrode structures is an important process parameter in determining the tendency to imprint and fatigue. In the case of PLZT thin films, the voltage shifts related to imprint are attributed to the trapping of electrons at ionic defect sites such as oxygen vacancies near the film/electrode interface, the magnitude of polarization, and concentration of defect-dipole complexes involving oxygen vacancies such as V 00Pb -V ≤≤ O . The strong dependence of fatigue rate on electrode material for PLZT thin films is due to the effect of the ferroelectric/electrode interaction on the pinning and/or unpinning rate involving the accumulation of oxygen vacancies near the film/electrode interface during fatigue cycling. By using RuO 2 as the top and/or bottom electrode instead of Pt, improved fatigue properties are obtained compared to Pt͞PLZT͞Pt capacitors. This is because a reduced accumulation of oxygen vacancies near the interface by the oxide electrode such as RuO 2 may reduce the electronic charge trapping and, consequently, lead to less domain wall pinning.

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Section: Methodsmentioning

confidence: 99%

Imprint and Fatigue Properties of Chemical Solution Derived Pb_1–-xLa_x(Zr_yTi_1–y)_1–x/4O₃ Thin Films

Kim

Hong

et al. 1999

J. Mater. Res.

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“…Pt(111) thin films (100 nm thick) grown on 20 nm thick TiO 2 /Ti adhesion layers on thermally oxidized silicon substrates have been utilized. The TiO 2 layer is used to passivate partially the adhesion layer [9] in order to prevent the inter-diffusion of the Ti on top of the platinum electrode potentially modifying there the nucleation conditions [10]. As the growth of PZT is nucleated controlled [11,12], homogeneous (111) textured platinum is required.…”

Section: Pzt Sol Gel Depositionmentioning

confidence: 99%

Piezoelectric micromachined ultrasonic transducers with thick PZT sol gel films

2007

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The fabricated micro machined ultrasonic transducers (pMUT) was based on piezoelectric laminated plates operating at flexural modes. The fabricated bimorph pMUT transducers were composed of 5-layers. A 4 μm thick lead zirconate titanate (PZT) thin film deposited by a sol-gel method was used. The piezoelectric layer exhibited a capacitance corresponding to a permitivity of e r =1,200. The electromechanical coupling coefficient (k 2 ) and quality factor (Q) were measured as k 2 =4.4% and Q=145 in air for a low frequency transducer (240 kHz). The effect of DC bias voltage on frequency and k 2 has been studied. The 16.9 MHz transducer yielded values of Q=25 in air and k 2 =3%.

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“…This role of Ti is masked when using the standard Pt/Ti electrodes, because the Ti is supplied unintentionally by the adhesion layer, which partially diffuses up to the Pt surface [2,8]. For this reason, standard Pt/Ti electrodes improve with suitable tempering procedures before deposition [9,10]. It can be assumed that they provide a certain amount of titanium oxide (i.e., titania) on the surface.…”

Section: Introductionmentioning

confidence: 99%

Texture control of PbTiO3 and Pb(Zr,Ti)O3 thin films with TiO2 seeding

Muralt

Maeder

Sagalowicz

et al. 1998

Journal of Applied Physics

265

131

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The nature and the role of 1 to 5 nm thick TiO 2 seed layers for the growth of textured PbTiO 3 and Pb(Zr,Ti)O 3 thin films on textured Pt(111) thin film substrates have been studied. Under otherwise identical in situ sputter deposition process conditions, the PbTiO 3 texture could be turned from (100) to (111) orientation by adding the seed layer. This is demonstrated by patterning the TiO 2 film. Auger electron spectroscopy and x-ray photoemission spectroscopy showed that the seed layer was a continuous TiO 2 film. X-ray photoelectron diffraction measurements revealed epitaxial ordering in the seed layer. As there is no azimuthal order among the Pt grains, the reduced information of azimuthally averaged polar cuts is obtained. These give strong evidence for a strained rutile (110) structure. Various deposition experiments indicated that the TiO 2 is effective only when it is ordered before the PbTiO 3 nucleation starts. The epitaxial relationship between PbTiO 3 (111) and Pt(111) is thus mediated by the intermediate, epitaxial TiO 2 film, which is dissolved or transformed to PbTiO 3 afterwards. The observed growth behavior is discussed in terms of surface and interface energies.

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Nucleation and orientation of sol-gel pzt-films on pt electrodes

Cited by 53 publications

References 8 publications

Imprint and Fatigue Properties of Chemical Solution Derived Pb_1–-xLa_x(Zr_yTi_1–y)_1–x/4O₃ Thin Films

Imprint and Fatigue Properties of Chemical Solution Derived Pb_1–-xLa_x(Zr_yTi_1–y)_1–x/4O₃ Thin Films

Piezoelectric micromachined ultrasonic transducers with thick PZT sol gel films

Texture control of PbTiO3 and Pb(Zr,Ti)O3 thin films with TiO2 seeding

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Nucleation and orientation of sol-gel pzt-films on pt electrodes

Cited by 53 publications

References 8 publications

Imprint and Fatigue Properties of Chemical Solution Derived Pb1–-xLax(ZryTi1–y)1–x/4O3 Thin Films

Imprint and Fatigue Properties of Chemical Solution Derived Pb1–-xLax(ZryTi1–y)1–x/4O3 Thin Films

Piezoelectric micromachined ultrasonic transducers with thick PZT sol gel films

Texture control of PbTiO3 and Pb(Zr,Ti)O3 thin films with TiO2 seeding

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Product

Resources

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Imprint and Fatigue Properties of Chemical Solution Derived Pb_1–-xLa_x(Zr_yTi_1–y)_1–x/4O₃ Thin Films

Imprint and Fatigue Properties of Chemical Solution Derived Pb_1–-xLa_x(Zr_yTi_1–y)_1–x/4O₃ Thin Films