Numerical analyses of hydrogen plasma generation by nanosecond pulsed high voltages at near-atmospheric pressure

Lo, Chieh-Wen; Hamaguchi, Satoshi

doi:10.1088/0022-3727/44/37/375201

Cited by 12 publications

(12 citation statements)

References 24 publications

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“…Kimura et al studied hydrogen inductively coupled plasmas (ICP) and obtained the H-atom density in fair agreement with actinometric measurements. Lo and Hamaguchi [69] and Donkó et al [70] studied pulsed nanosecond high pressure hydrogen microdischarges using PIC/MCC. Under the highpressure conditions they assumed that the H + 2 ions were converted effectively to H + 3 and used a simplified chemistry with only one ionic species (i.e.…”

Section: Introduction and Literature Reviewmentioning

confidence: 99%

Hybrid simulation of a dc-enhanced radio-frequency capacitive discharge in hydrogen

Diomede¹,

Longo²,

Economou³

et al. 2012

J. Phys. D: Appl. Phys.

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A PIC-MCC/fluid hybrid model was employed to study a parallel-plate capacitively coupled radio-frequency discharge in hydrogen, under the application of a dc bias voltage. When a negative dc voltage was applied to one of the electrodes of a continuous wave (cw) plasma, a 'beam' of secondary electrons was formed that struck the substrate counter-electrode at nearly normal incidence. The energy distribution of the electrons striking the substrate extended all the way to V RF + |V dc |, the sum of the peak RF voltage and the absolute value of the applied dc bias. Such directional, energetic electrons may be useful for ameliorating charging damage in etching of high aspect ratio nano-features. The vibrational distribution function of molecular hydrogen was calculated self-consistently, and was found to have a characteristic plateau for intermediate values of the vibrational quantum number, v. When a positive dc bias voltage was applied synchronously during a specified time window in the afterglow of a pulsed plasma, the ion energy distributions (IEDs) of positive ions acquired an extra peak at an energy equivalent of the applied dc voltage. The electron energy distribution function was slightly and temporarily heated during the application of the dc bias pulse. The calculated IEDs of H + 3 and H + 2 ions in a cw plasma without dc bias were found to be in good agreement with published experimental data.

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Section: Introduction and Literature Reviewmentioning

confidence: 99%

Hybrid simulation of a dc-enhanced radio-frequency capacitive discharge in hydrogen

Diomede¹,

Longo²,

Economou³

et al. 2012

J. Phys. D: Appl. Phys.

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“…One is the randomness of the ignition process and the other one is the randomness of the propagation process. Most of the previous works have focused on the latter process 24,[35][36][37] whereas the streamer ignition process [38][39][40][41] has attracted less attention. The ignition delay time is a critical characteristic for better understanding of the influence of the background ionization level on the repetitive behavior of the streamers.…”

Section: B Streamer Repeatabilitymentioning

confidence: 99%

Effect of background ionization on plasma ignition dynamics

et al. 2017

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The influence of background ionization on the ignition dynamics of the pulsed plasma plume is studied. The ignition delay time of each pulse is investigated by recording the voltage signal and the light emission signal. By changing the frequency, the relationship between the pulse-off time and the ignition delay time is revealed. This indicates that residual active species produced in the previous discharge play a role in the next one. With the decrease in the frequency, both time delay and ignition delay time increase. This is due to the decay of the reactive species densities in the pulse-off time. Lower concentrations of these species lead to a longer ignition delay time. The functions for calculating the ignition delay time are utilized to explain the effect of residual species. The independent data of each discharge also evidence the impact of the previous pulse. The exotic relationship between the ignition delay times of the first two pulses may be due to the electrode configuration used in this work. For a pin-to-plane electrode structure, the active species produced during the breakdown are accumulated around the anode (pin-point) where the discharge initiated for the asymmetrical electric field distribution.

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“…Thus, despite their excitation is continuous (a simple sine wave voltage waveform) the current through the discharge flows during limited time [34][35][36]. Discharges generated by various short-pulse waveforms [37][38][39][40][41][42][43][44][45][46][47][48] have found applications in combustion [49,50], aerodynamic flow control [51,52], switching [53,54], spectroscopy [55][56][57][58], synthesis of nanomaterials [59], conversion of gases [60,61] as well as in biomedical applications through the generation of reactive species at ambient pressure and temperature [62][63][64][65][66][67].…”

Section: Introductionmentioning

confidence: 99%

Modeling characterisation of a bipolar pulsed discharge

Donko,

Zajickova,

Sugimoto

et al. 2020

Preprint

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We apply particle based kinetic simulations to explore the characteristics of a low-pressure gas discharge driven by high-voltage (∼ kV) pulses with alternating polarity, with a duty cycle of ≈ 1% and a repetition rate of 5 kHz. The computations allow tracing the spatio-temporal development of several discharge characteristics, the potential and electric field distributions, charged particle densities and fluxes, the mean ion energy at the electrode surfaces, etc. As such discharges have important surface processing applications, e.g. in the treatment of artificial bones, we analyse the timedependence of the flux and the mean energy of the ions reaching the electrode surfaces, which can be both conducting and dielectric. Our investigations are conducted for argon buffer gas in the 40-140 Pa pressure range, for 1-5 cm electrode gaps and voltage pulse amplitudes ranging between 600 V and 1200 V.

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Numerical analyses of hydrogen plasma generation by nanosecond pulsed high voltages at near-atmospheric pressure

Cited by 12 publications

References 24 publications

Hybrid simulation of a dc-enhanced radio-frequency capacitive discharge in hydrogen

Hybrid simulation of a dc-enhanced radio-frequency capacitive discharge in hydrogen

Effect of background ionization on plasma ignition dynamics

Modeling characterisation of a bipolar pulsed discharge

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