2022
DOI: 10.1007/s11664-022-09737-x
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Numerical Analysis and Lasing Characteristics of GaInAsP Double-Heterostructure Lasers on InP/Si Substrate

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“…Using the hydrophilic adhesive model, we obtained the composition of InP thin film and Si substrate evenly bonded and there were no traces of debonding, enabling us to manufacture FP LDs. [17,18] For the fabrication of the LD, we bonded 2 cm * 2 cm InP thin film and 3 cm* 3 cm Si substrate. After the bonding of the InP thin film and Si substrate, the void density and the void area occupancy were observed to be 482 cm À2 and 0.094%, and void height was about 0.5 μm.…”
Section: Methodsmentioning
confidence: 99%
“…Using the hydrophilic adhesive model, we obtained the composition of InP thin film and Si substrate evenly bonded and there were no traces of debonding, enabling us to manufacture FP LDs. [17,18] For the fabrication of the LD, we bonded 2 cm * 2 cm InP thin film and 3 cm* 3 cm Si substrate. After the bonding of the InP thin film and Si substrate, the void density and the void area occupancy were observed to be 482 cm À2 and 0.094%, and void height was about 0.5 μm.…”
Section: Methodsmentioning
confidence: 99%