2008 Symposium on Design, Test, Integration and Packaging of MEMS/MOEMS 2008
DOI: 10.1109/dtip.2008.4752988
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Numerical and compact modelling of squeeze-film damping in RF MEMS resonators

Abstract: Abstract-Oscillatory gas flow in squeeze-film dampers is studied up to frequencies where the length of the acoustic wave is comparable with the dimensions of the air gap. Damping and spring forces are calculated both numerically and analytically from the linearized 2D Navier-Stokes equations. In addition to the low frequency region of inertialess gas, where the use of the Reynolds equation is limited, the new model considers several additional phenomena. These are the inertia of the gas, the transition from is… Show more

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Cited by 4 publications
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“…one for the electromechanical coupling, and another for the RF properties, making the overall design optimization in the loop more complex. In light of these considerations, there exist multi-domain simulation approaches based on simplified/compact analytical models, as well as on equivalent lumped element networks [21] [22], that enable fast simulation and DoFs assessment of RF-MEMS, at the cost of lower accuracy and reduced usability. As a matter of fact, the best practice is often that on using both tools, i.e.…”
Section: Introductionmentioning
confidence: 99%
“…one for the electromechanical coupling, and another for the RF properties, making the overall design optimization in the loop more complex. In light of these considerations, there exist multi-domain simulation approaches based on simplified/compact analytical models, as well as on equivalent lumped element networks [21] [22], that enable fast simulation and DoFs assessment of RF-MEMS, at the cost of lower accuracy and reduced usability. As a matter of fact, the best practice is often that on using both tools, i.e.…”
Section: Introductionmentioning
confidence: 99%