Numerical and experimental analysis of thermal-flow characteristics in a pyrolysis reactor of a gas scrubber designed based on similitude theory

Yoon, Jonghyuk; Kim, Youngbae; Song, Hyoung Woon

doi:10.1080/10962247.2020.1738283

Cited by 3 publications

(1 citation statement)

References 13 publications

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“…RCFs are used as insulation for semiconductor scrubbers that operate under high temperatures, i.e., 700°C or higher. The scrubber, which is maintained at this high temperature, is used to treat waste gases generated during the semiconductor manufacturing process [ 12 ]. Since the scrubber is in constant use, regular preventive maintenance is required to ensure safety, during which workers could get exposed to RCFs.…”

Section: Introductionmentioning

confidence: 99%

Occupational Exposure to Refractory Ceramic Fibers in the Semiconductor Scrubber Manufacturing Industry

Song

Kim

et al. 2022

Safety and Health at Work

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Section: Introductionmentioning

confidence: 99%

Occupational Exposure to Refractory Ceramic Fibers in the Semiconductor Scrubber Manufacturing Industry

Song

Kim

et al. 2022

Safety and Health at Work

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Plasma Pretreatment System for the Reduction of By-Product Particles in Semiconductor Manufacturing

Jo,

Choi,

Hong

2024

IEEE Trans. Semicond. Manufact.

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A Study on the Development of Destruction or Removal Efficiency (DRE) Considering the Characteristics of Greenhouse Gas Abatement Technology Used in the Semiconductor and Display Industries in South Korea

Woo,

Min,

Kang

et al. 2024

Atmosphere

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In this study, the Destruction or Removal Efficiency (DRE) of 10 types of F-gases used in the semiconductor and display industries in South Korea was measured. These industries use a large volume of F-gases with high Global Warming Potential (GWP), significantly contributing to national greenhouse gas emissions. Therefore, accurately calculating the greenhouse gas emissions from these industries and establishing appropriate mitigation plans is crucial. The current IPCC guidelines provide parameters for estimating greenhouse gas emissions for each gas, including DRE values. However, they present only a single coefficient for each gas, without considering the diverse abatement technologies that are commercially applied in practice. As a result, there is a potential for overestimating South Korea’s national greenhouse gas emissions, as these guidelines do not reflect the advanced abatement technologies used in each country’s semiconductor and display industries. To address this, the DREs of Combustion-type and Plasma-type abatement technologies, which are widely used in South Korea, were measured based on the Korean KS guidelines, developed from the U.S. EPA’s reduction efficiency measurement guidelines. The results showed that Plasma-type technologies, which are generally known to have better reduction efficiency, achieved higher DRE values compared with Combustion-type technologies. Furthermore, statistical analysis was conducted using SPSS 26 to assess whether it is significant to develop separate DRE values for different technologies. The analysis confirmed that developing distinct DREs for each technology is statistically significant. The findings of this study provide practical guidance for selecting optimal abatement technologies in South Korea’s semiconductor and display industries and serve as fundamental data for contributing to the achievement of sustainable carbon neutrality goals through more accurate greenhouse gas inventories in countries involved in semiconductor and display production.

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Numerical and experimental analysis of thermal-flow characteristics in a pyrolysis reactor of a gas scrubber designed based on similitude theory

Cited by 3 publications

References 13 publications

Occupational Exposure to Refractory Ceramic Fibers in the Semiconductor Scrubber Manufacturing Industry

Occupational Exposure to Refractory Ceramic Fibers in the Semiconductor Scrubber Manufacturing Industry

Plasma Pretreatment System for the Reduction of By-Product Particles in Semiconductor Manufacturing

A Study on the Development of Destruction or Removal Efficiency (DRE) Considering the Characteristics of Greenhouse Gas Abatement Technology Used in the Semiconductor and Display Industries in South Korea

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