Through the combination of two or more materials to one compound, for example high-strength steel and aluminum, hybrid massive components can be manufactured, whose properties are specially adapted to the respective application. One of the challenges is the joining zone which is influenced by machining induced residual stresses. In order to examine the residual stress modifications by the machining process and in addition to analyze the influence of these residual stress gradients on the lifespan of hybrid components a non-destructive method of measuring depth-resolved residual stress is necessary. Therefore, an innovative energy dispersive X-ray measurement technique is used in the collaborative research center 1153 (CRC 1153). In this study the suitability of the method is examined by comparing the results with the angle dispersive method both in machined front surface of mono materials and hybrid shafts. A parametrical study shows the possibility to get greater depth information by variation of the measuring parameters Bragg angle, tilting angle, collimator and current. In addition, the results of the energy dispersive method combined with electrolytic removal is shown. Based on these results the evaluation of the reliability and reproducibility of energy dispersive residual stress measurements is completed.