2002
DOI: 10.1016/s0021-8502(02)00047-2
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Numerical modeling of silicon oxide particle formation and transport in a one-dimensional low-pressure chemical vapor deposition reactor

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Cited by 22 publications
(11 citation statements)
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“…The only mechanism included in this study is Brownian coagulation; other internal/external forces such as electrostatic or Van Der Waals forces are neglected (Hamaker 1937;Lifshitz 1956;Langbein 1974;Kerminen 1994;Friedlander 2000;Suh et al 2002). As a result, the source term,ω k , represents Brownian particle-particle interactions.…”
Section: Particle Transportmentioning
confidence: 99%
“…The only mechanism included in this study is Brownian coagulation; other internal/external forces such as electrostatic or Van Der Waals forces are neglected (Hamaker 1937;Lifshitz 1956;Langbein 1974;Kerminen 1994;Friedlander 2000;Suh et al 2002). As a result, the source term,ω k , represents Brownian particle-particle interactions.…”
Section: Particle Transportmentioning
confidence: 99%
“…A finite rate chemistry model for the precursor chemistry is applied to model silane combustion (Suh et al 2001;Suh et al 2002). We use the mechanism provided by Suh et al (2001) including 63 species and 264 reactions at their reported rates for atmospheric pressure.…”
Section: Numerical Configurationmentioning
confidence: 99%
“…The solution of these equations provides the hydrodynamic ÿeld. A moment method is used to represent the particle ÿeld (Lee, Chen, & Gieseke, 1984;Pratsinis, 1988;Suh et al, 2002;Settumba & Garrick, 2003). The method assumes a lognormal particle size distribution.…”
Section: Mathematical Formulationmentioning
confidence: 99%
“…where c is the mean thermal speed, the accommodation coe cient and is the uid density (Friedlander, 2000;Suh et al, 2002). The di usion term in our original work is given by…”
Section: Mathematical Formulationmentioning
confidence: 99%
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