Numerical optimization of hydrogen microwave plasma reactor for diamond film deposition

Hrebtov, M. Yu.; Bobrov, M. S.

doi:10.1088/1742-6596/1382/1/012010

Cited by 5 publications

(3 citation statements)

References 5 publications

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“…In [15,20,21], the features of microwave plasma formation in our configuration were studied by numerical methods. In [22,23], a numerical analysis of the flow of gas mixtures from the nozzle in the deposition chamber and their interaction with the substrate was performed.…”

Section: Gas-jet Synthesis Of Diamond Structuresmentioning

confidence: 99%

Effect of methane flow rate on gas-jet MPCVD diamond synthesis

Emel’yanov¹,

Pinaev²,

Plotnikov³

et al. 2022

J. Phys. D: Appl. Phys.

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The paper describes synthesis of diamonds by the method of gas-jet deposition with microwave activation of precursor gases. This method involves the use of supersonic jet for delivering the components activated in the discharge chamber to the substrate located in the deposition chamber. A series of experiments was carried out with different amounts of methane supplied at a hydrogen flow rate of 8000 sccm. The obtained samples of diamond coatings were studied by scanning electron microscopy and Raman spectroscopy. The temperature of the mixture and the intensities of H, CH, and C2 lines in the plasma of the discharge chamber were measured by optical emission spectroscopy. The values of pressure and temperature in the discharge chamber were used to estimate the composition of the mixture. Thus, the numerical dependences of the molar concentrations of CH3, CH, C2 and C2H2 on the initial concentration of methane have been obtained. These dependences are in qualitative agreement with the dependences of the intensities of H, CH, and С2 lines. The numerical-experimental study performed allows us to conclude that the optimal value of methane concentration in the supplied mixture for the gas-jet deposition method in the considered range of parameters is about 1%.

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Section: Gas-jet Synthesis Of Diamond Structuresmentioning

confidence: 99%

Effect of methane flow rate on gas-jet MPCVD diamond synthesis

Emel’yanov¹,

Pinaev²,

Plotnikov³

et al. 2022

J. Phys. D: Appl. Phys.

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“…To verify the model, the results of calculations based on the described model were compared with those with the drift-diffusion model from [5], with the resolution of individual evolutionary equations for the energy and concentration of electrons, taking into account the Coulomb interaction of electrons. The calculations were compared for a cylindrical resonance chamber (100 mm in diameter and 170 mm high, simulating the experimental setup), filled with molecular hydrogen, with a pressure of 50 Torr, with an input microwave radiation power of 3 kW and a frequency of 2.45 GHz.…”

Section: Computation Detailsmentioning

confidence: 99%

Numerical investigation of energy transfer efficiency from microwave radiation to plasma in a cylindrical resonant cavity

Hrebtov

Bobrov

2021

J. Phys.: Conf. Ser.

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The paper presents a simplified numerical model of the hydrogen plasma generation process in a microwave resonant cavity. The model assumes electroneutrality and the prescribed electron temperature of the plasma, thus significantly reducing the computational cost. This allows for the parametric study in a wide range of operating pressures end electric field magnitudes (at a frequency of 2.45GHz). The prescribed model allows finding the effective range of operating pressures for the plasma generation. At low pressures, the collision rate is too low to effectively absorb all the emitted energy while at high pressures the electron conductivity drops which also reduces the absorption efficiency.

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“…In [7,8], a numerical analysis of flows of gas mixtures formed under conditions of gas-jet deposition is carried out. In [5,9], numerical methods are used to study methods of optimizing the process of microwave plasma formation in the considered configuration. The results of a detailed study of diamond structures synthesized by the gas-jet method are presented in [10,11].…”

Section: Introductionmentioning

confidence: 99%

Effective cooling of substrates with low thermal conductivity under conditions of gas-jet MPCVD diamond synthesis

Emel’yanov

Plotnikov

Тимошенко

et al. 2021

J. Phys.: Conf. Ser.

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The paper presents the results of an experimental study of heating molybdenum and silicon substrates under the conditions of gas-jet deposition of diamond structures using the precursor gases of a microwave discharge to activate. A cooled substrate holder using a metal melt to improve heat removal by reducing the thermal resistance between the substrate and the substrate holder has been developed. The use of the melt allowed lowering the temperature of the silicon substrate under the conditions of gas-jet deposition to a level that ensures the preservation of its structure. The developed substrate holders were used to carry out gas-jet synthesis of diamond structures on molybdenum and silicon substrates.

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Numerical optimization of hydrogen microwave plasma reactor for diamond film deposition

Cited by 5 publications

References 5 publications

Effect of methane flow rate on gas-jet MPCVD diamond synthesis

Effect of methane flow rate on gas-jet MPCVD diamond synthesis

Numerical investigation of energy transfer efficiency from microwave radiation to plasma in a cylindrical resonant cavity

Effective cooling of substrates with low thermal conductivity under conditions of gas-jet MPCVD diamond synthesis

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