Numerical simulation and experimental study of surface waviness during full aperture rapid planar polishing

Xie, Ruiqing; Zhao, Shijie; Liao, Defeng; Chen, Xianhua; Wang, Jian; Xu, Qiao; Zhao, Huiying; Jiang, Zhuangde

doi:10.1007/s00170-018-2175-7

Cited by 16 publications

(3 citation statements)

References 22 publications

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“…Planar optical components are in huge demand in large-scale optical devices such as space telescopes and laser devices, the process of optical components is developing towards large-aperture and high-precision. Using conventional continuous polishing to fabricate large-aperture planar optical elements is one of the most commonly used manufacturing methods owing to simple operation and low cost 1 . The continuous polishing process can effectively reduce surface roughness and subsurface defects after grinding, improve the surface accuracy of optical components, and the surface quality of the polished components have a direct impact on subsequent processes.…”

Section: Introductionmentioning

confidence: 99%

Effects of disk size and position on material removal characteristic on double-sided polishing

Huang,

Guo,

Zhao

et al. 2024

Speckle 2023: VIII International Conference on Speckle Metrology

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Using the method of double-sided polishing with oscillating and rotating upper disk, we have investigated the material removal behavior of flat fused silica. It is suggested that the material removal characteristics of the optics depend on the positon and size of the upper polishing disk. Measurements together with the kinematic model results show that the effect of the swing position and size of upper polishing disk similar to sub-aperture polishing, leading to the non-uniformity distribution of the material removal on the surface of the optic component. the surface figure errors of 0.5 wavelengths is achieved after polishing process. The efficiency and quality of double-sided polishing can be improved through changing polishing disk and swing position according to this study.

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Section: Introductionmentioning

confidence: 99%

Effects of disk size and position on material removal characteristic on double-sided polishing

Huang,

Guo,

Zhao

et al. 2024

Speckle 2023: VIII International Conference on Speckle Metrology

Self Cite

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“…One of the crucial tasks required to be resolved is to propose a method for a precise definition of the S-L surface for the textures containing some deep or wide features. It was observed in previous studies that the false estimation of the L-surface can enlarge the errors in the evaluation of the ISO 25178 surface topography parameters for various surfaces (e.g., turned [58], ground [59], laser-textured [60] and other topographies [61]). Plenty of detailed proposals can be presented with a thresholding method [62].…”

Section: Introductionmentioning

confidence: 99%

Roughness Evaluation of Burnished Topography with a Precise Definition of the S-L Surface

Podulka

2022

Applied Sciences

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Studies of surface topography including processes of measurement and data analysis have an influence on the description of machined parts with their tribological performance. Usually, surface roughness is analysed when a scale-limited (S-L) surface, excluding short (S-) and length (L-) components from the raw measured data, is defined. Errors in the precise definition of the S-L surface can cause the false estimation of detail properties, especially its tribological performance. Errors can arise when the surface contains some burnished details such as oil pockets, dimples, scratches, or, generally, deep or wide features. The validation of proposed methods for S-L surface definition can also affect the accuracy of the ISO 25178 surface topography parameter calculation. It was found that the application of commonly used procedures, available in commercial software (e.g., least-square fitted cylinder element or polynomial planes, regular or robust Gaussian regression, spline, median or fast Fourier transform filters) can be suitable for precise S-L surface definition. However, some additional analyses, based on power spectral densities, autocorrelation function, texture direction graphs, or spectral characterisation, are strongly required. The effect of the definition of the S-L surface on the values of the ISO 25178 parameters was also comprehensively studied. Some proposals of guidance on how to define an appropriate S-L surface with, respectively, an objective evaluation of surface roughness parameters, were also presented.

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“…Conventionally, surface finishing process [10][11][12] followed by machining process is considered as one of the standard procedures to improve the surface quality of optical elements. Further, the ultraprecision machining technology has been rapidly developed through numerous studies, such as parameter optimization [13][14][15][16][17] and random path generation [18,19]. Although the surface finishing process has been developed as a way to indisputably improve the quality of optical surfaces, it is time-consuming and less economical owing to the additional efforts that are required after the machining process.…”

Section: Introductionmentioning

confidence: 99%

Novel Approach to Improve the Optical Performance by Machining Process Without Surface Finishing

Park

Lee

Kim

et al. 2021

Int. J. of Precis. Eng. and Manuf.-Green Tech.

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With the increase in dimensions of optical elements in addition to ever rising demand for aspherical optics, the millimeter-scale periodic waviness that is naturally produced by machining (such as diamond turning) process in precision optical engineering has been one of the most crucial issues in the development of high surface quality optical elements. Even an extremely small waviness can affect the laser beam profile significantly through interference caused by Bragg scattering. This paper presents a novel method for improving a laser beam profile by utilizing the characteristics of Bragg scattering without requiring established final surface finishing processes such as optical polishing. By engraving an artificial periodic structure with a period of a few hundred microns, the Bragg scattering angle that influences the formation of interference fringes in the laser beam profile was drastically enlarged. Consequently, the quality of the beam profile was improved at a propagation distance where the 0th and 1st (− 1st) order beam modes are spatially separated, only by diamond turning machining without the surface finishing process. In addition, this approach represents an important contribution to green technology, which seeks energy saving and waste reduction in the optical surface manufacturing process.

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Numerical simulation and experimental study of surface waviness during full aperture rapid planar polishing

Cited by 16 publications

References 22 publications

Effects of disk size and position on material removal characteristic on double-sided polishing

Effects of disk size and position on material removal characteristic on double-sided polishing

Roughness Evaluation of Burnished Topography with a Precise Definition of the S-L Surface

Novel Approach to Improve the Optical Performance by Machining Process Without Surface Finishing

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