Numerical study on response time of a parallel plate capacitive polyimide humidity sensor based on microhole upper electrode

Zhou, Wenhe; He, Xuan; Wu, Jiangbo; Wang, Liang-Bi; Wang, Liangcheng

doi:10.1117/1.jmm.16.3.034502

Cited by 9 publications

(5 citation statements)

References 17 publications

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“…Recently, the effects of sensor structures on humidity-sensing characteristics have been reported from various perspectives [9,12], but few works consider the effects of the film thickness. Since both capacitance and response time are related to thickness, thickness will inevitably affect the properties of the sensor [13,14]. During the past decade, a novel type of 2D transition metal carbide and carbon-nitrogen-labeled MXene families have been widely researched for their potential applications in humidity sensing, food analysis, clinical detection, and many other fields [15][16][17][18][19][20].…”

Section: Introductionmentioning

confidence: 99%

“…Few attempts have been made on the MXene humidity-sensing mechanism through theoretical analysis [32][33][34]. Note that the theoretical models for other humidity-sensitive materials have been established, which facilitates the optimization of the sensor parameters [14,35]. In view of this, this paper aims to fill this gap through theoretical modeling and simulation.…”

Section: Introductionmentioning

confidence: 99%

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Theoretical and Simulation Analysis of Static and Dynamic Properties of MXene-Based Humidity Sensors

Wang

et al. 2022

Applied Sciences

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In this paper, the static and dynamic characteristics of the MXene-based IDE capacitive humidity sensor are investigated through theoretical modeling and simulation. It is found that the capacitance increases according to the thickness of the sensing film within a certain range while stopping increases along with the growth of the thickness when the thickness is over a threshold. When the thickness is at a tiny level, a larger thickness does not lead to a significant increase in the response time due to the diffusion mechanism of water molecules. When the thickness increases to certain extent, there is an evident relationship between the response time and the change of thickness. For the humidity-sensitive film, under the same relative humidity conditions, the capacitance has a positive correlation with temperature, and the response time shows the opposite trend. Subsequent studies on the sensitive mechanisms of MXene materials explain these phenomena and demonstrate the accuracy of the model. This provides a more accurate method for sensor design. The properties of the MXene capacitive humidity sensor can be optimized by changing its structure and adjusting material parameters.

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Section: Introductionmentioning

confidence: 99%

Section: Introductionmentioning

confidence: 99%

Theoretical and Simulation Analysis of Static and Dynamic Properties of MXene-Based Humidity Sensors

Wang

et al. 2022

Applied Sciences

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“…The numerical results show that the response time of the microhole upper electrode sensor is 86% better than that of the grid upper electrode sensor. The response time of the humidity sensor can be improved by reducing the hole spacing, increasing the aperture, reducing film thickness, and reasonably enlarging the porosity of the film [32]. In 2018, Liang realized a capacitive humidity sensor with a moisture-sensitive film thickness of 1.5 µm and 3.0 µm.…”

Section: Introductionmentioning

confidence: 99%

Design and Optimization of Interdigital Capacitive Humidity Sensor with Highly Sensitive and Dynamic Response Time

Chen

Zheng

et al. 2022

Applied Sciences

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Humidity sensors are widely used in various fields of life. In meteorological detection, the sensor must have high sensitivity and fast dynamic response time due to extreme environmental interference. However, the sensitive mechanism of the humidity sensor determines that the dynamic response time will inevitably be increased while improving the sensitivity, which undoubtedly creates difficulties for sensor design. This article takes the interdigitated capacitive humidity sensor as the research object and proposes an optimal design scheme for the sensor that considers high dynamic response time and sensitivity. By constructing the sensor’s theoretical mathematical model, the influence of each structure is analyzed. The theoretical model has been verified by finite element simulation to have an accuracy higher than 95%. The article constructs the sensor optimization objective equation based on this model. Through analysis, within the range of structural parameters set in the article, to improve the sensitivity and reduce the dynamic response time of the sensor, the width and spacing of the interdigital electrodes should have a minimum value of 3 μm and a maximum value of 14 μm, respectively. The thickness of the electrode layer and the moisture-sensitive layer should be flexibly adjusted according to the application to ensure the lowest value of the optimization objective function. To further improve the sensor’s performance, the article optimizes the electrode structure and heating strategy of the sensor heating layer, which not only enhances the uniformity of heat transfer but also increases the optimal heat transfer area by 6% compared with the traditional scheme.

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“…Etching of the sensing material creates roughness in the surface, which results in the improvement of response time and capacitance sensitivity. 7,8,18 However, despite these studies, the mechanism of the etching effect on the humidity sensor is still elusive due to the difficulty in separating the effects of the geometrical change and etchinginduced porosity on the overall performance. In this work, we investigate the sensing properties of graphene oxide (GO) humidity sensors with a metal/ insulator/metal configuration using COMSOL Multiphysics.…”

Section: Introductionmentioning

confidence: 99%

“…More recently, a few studies have proposed adding the etching process to improve the sensing performance of the humidity sensor. Etching of the sensing material creates roughness in the surface, which results in the improvement of response time and capacitance sensitivity. ,, However, despite these studies, the mechanism of the etching effect on the humidity sensor is still elusive due to the difficulty in separating the effects of the geometrical change and etching-induced porosity on the overall performance.…”

Section: Introductionmentioning

confidence: 99%

Numerical Study of a Capacitive Graphene Oxide Humidity Sensor with Etched Configuration

Mohammedture

Hashmi

et al. 2021

ACS Omega

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The geometrical dependence of humidity sensors on sensing performance has not been quantitatively outlined. Furthermore, the etching effect on humidity sensors is still elusive due to the difficulty in separating the effects of the geometrical change and etching-induced porosity on the overall performance. Here, we use COMSOL Multiphysics to perform a numerical study of a capacitive graphene oxide (GO) humidity sensor, with emphasis on the dimensions and etching effect on their sensing performance. GO is a useful and promising material in detecting humidity because of its selective superpermeability to water molecules. The mechanism of improved sensing performance of the etched humidity sensors is discussed in terms of the morphological profile and the effective permittivity including the etching-induced porosity effect. Our study shows that as compared to the unetched sensors, isotropic etching achieves the lowest response time of 1.011 s at 15.75% porosity, while vertical etching achieves the highest capacitance sensitivity of 0.106 fF/RH %.

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Numerical study on response time of a parallel plate capacitive polyimide humidity sensor based on microhole upper electrode

Cited by 9 publications

References 17 publications

Theoretical and Simulation Analysis of Static and Dynamic Properties of MXene-Based Humidity Sensors

Theoretical and Simulation Analysis of Static and Dynamic Properties of MXene-Based Humidity Sensors

Design and Optimization of Interdigital Capacitive Humidity Sensor with Highly Sensitive and Dynamic Response Time

Numerical Study of a Capacitive Graphene Oxide Humidity Sensor with Etched Configuration

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