O2 rf discharge structure in parallel plates reactor at 13.56 MHz for material processing

Shibata, Mari; Nakano, Nobuhiko; Makabe, Toshiaki

doi:10.1063/1.359144

Cited by 64 publications

(50 citation statements)

References 24 publications

Supporting

Mentioning

Contrasting

Order By: Relevance

“…Plasmas 13, 057102 ͑2006͒ differ considerably and are similar to the relaxation continuum simulation data of Shibata et al 22,23 The electron temperature and power absorbed by electrons calculated by the 2D fluid simulation differ from 1D PIC-MCC simulation data. These data show that fluid simulations cannot describe the kinetic effects of charged particles, which are critical in CCPs.…”

Section: -6supporting

confidence: 55%

Particle-in-cell Monte Carlo and fluid simulations of argon-oxygen plasma: Comparisons with experiments and validations

2006

View full text Add to dashboard Cite

Particle-in-cell Monte Carlo collision (PIC-MCC) and fluid simulations of argon-oxygen plasmas in capacitively and inductively coupled plasma reactors are presented. Potential profiles and electron/ion kinetic information such as electron/ion energy distributions and temperatures are compared with experimental data as well as with other analytical and numerical results. One-dimensional PIC-MCC simulations compare favorably with experimental data obtained in capacitively coupled reactors over a wide range of pressure and power. Two-dimensional fluid simulations of capacitive discharges differs from the results of PIC-MCC simulations as nonlocal effects play an important role in these discharges. Fluid simulations as nonlocal inductively coupled plasmas, however, agree favorably with experimental observations.

show abstract

Section: -6supporting

confidence: 55%

Particle-in-cell Monte Carlo and fluid simulations of argon-oxygen plasma: Comparisons with experiments and validations

2006

View full text Add to dashboard Cite

show abstract

“…As it has been observed in oxygen discharges [78][79][80] as well as in other electronegative plasmas [81][82][83][84], a double layer may appear in electronegative discharges under certain conditions. The formation of a double layer leads to a peak in the electron density localized in front of the electrode sheaths around the time of sheath collapse.…”

Section: Control Of the Density Profilesmentioning

confidence: 96%

Control of plasma properties in capacitively coupled oxygen discharges via the electrical asymmetry effect

Schüngel¹,

Zhang²,

Iwashita³

et al. 2011

J. Phys. D: Appl. Phys.

View full text Add to dashboard Cite

To cite this version:E Schüngel, Q-Z Zhang, S Iwashita, J Schulze, L-J Hou, et al.. Control of plasma properties in capacitively coupled oxygen discharges via the electrical asymmetry effect. Journal of Physics D: Applied Physics, IOP Publishing, 2011, 44 (28) Abstract. By using a combined experimental, numerical and analytical approach, we investigate the control of plasma properties via the Electrical Asymmetry Effect (EAE) in a capacitively coupled oxygen discharge. In particular, we present the first experimental investigation of the EAE in electronegative discharges. A dual-frequency voltage source of 13.56 MHz and 27.12 MHz is applied to the powered electrode and the discharge symmetry is controlled by adjusting the phase angle θ between the two harmonics. It is found that the bulk position and density profiles of positive ions, negative ions, and electrons have a clear dependence on θ, while the peak densities and the electronegativity stay rather constant, largely due to the fact that the time averaged power absorption by electrons is almost independent of θ. This indicates that the ion flux towards the powered electrode remains almost constant. Meanwhile, the dc self-bias and, consequently, the sheath widths and potential profile can be effectively tuned by varying θ. This enables a flexible control of the ion bombarding energy at the electrode. Therefore, our work proves the effectiveness of the EAE to realize separate control of ion flux and ion energy in electronegative discharges. At low pressure, the strength of resonance oscillations, which are found in the current of asymmetric discharges, can be controlled with θ.

show abstract

“…The dependencies on oxygen pressure obtained from the best-fit lines to the data are O ∝ P O2 0.6 , O 2 ( 1 ∆ g ) ∝ P O2 0.5 , O 2 ( 1 Σ g + ) ∝ P O2 -0.2 , and O 3 ∝ P O2 1.5 . Shibata et al 30 have modeled the structure of an oxygen discharge in a parallel-plate reactor driven with 150 W RF power at 13.56 MHz and a total oxygen pressure of 0.5 Torr. They predict an average number density for oxygen atoms of ∼3 × 10 14 cm -3 .…”

Section: Concentration Of the Reactive Species Shown Inmentioning

confidence: 99%

Reaction Chemistry in the Afterglow of an Oxygen−Helium, Atmospheric-Pressure Plasma

et al. 2000

View full text Add to dashboard Cite

The reaction chemistry in the afterglow of a non-equilibrium, capacitive discharge, operated at 600 Torr total pressure with (0.5 to 5.0) × 10 17 cm -3 of oxygen in helium, has been examined by ultraviolet absorption spectroscopy, optical emission spectroscopy, and numerical modeling. The densities of the active species,and O 3 , have been determined as a function of the operating conditions. At RF power densities between 6.1 and 30.5 W/cm 3 and a neutral temperature of 100 ( 40°C, the plasma generated (0.2 to 1.0) × 10 16 cm -3 of O( 3 P) and O 2 ( 1 ∆ g ), (0.2 to 2.0) × 10 15 cm -3 of O 2 ( 1 Σ g + ), and (0.1 to 4.0) × 10 15 cm -3 of O 3 . After the power was turned off, the singlet-sigma and singlet-delta states decayed within 0.1 and 30.0 ms, respectively. The concentration of oxygen atoms remained constant for about 0.5 ms, then fell rapidly due to recombination with O 2 to form O 3 . It was found that the etching rate of polyimide correlated with the concentration of oxygen atoms in the afterglow, indicating that the O atoms were the active species involved in this process.

show abstract

O2 rf discharge structure in parallel plates reactor at 13.56 MHz for material processing

Cited by 64 publications

References 24 publications

Particle-in-cell Monte Carlo and fluid simulations of argon-oxygen plasma: Comparisons with experiments and validations

Particle-in-cell Monte Carlo and fluid simulations of argon-oxygen plasma: Comparisons with experiments and validations

Control of plasma properties in capacitively coupled oxygen discharges via the electrical asymmetry effect

Reaction Chemistry in the Afterglow of an Oxygen−Helium, Atmospheric-Pressure Plasma

Contact Info

Product

Resources

About