2002
DOI: 10.1007/s11664-002-0079-6
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Ohmic contact formation on inductively coupled plasma etched 4H-silicon carbide

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Cited by 9 publications
(1 citation statement)
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“…Those differences can be due to the structural variation of the sample surface induced by ashing. 23) In fact, c and surface roughness show similar trends, as seen in Fig. 6.…”
Section: Inductively Coupled O 2 Plasmasupporting
confidence: 68%
“…Those differences can be due to the structural variation of the sample surface induced by ashing. 23) In fact, c and surface roughness show similar trends, as seen in Fig. 6.…”
Section: Inductively Coupled O 2 Plasmasupporting
confidence: 68%