We report a fabrication approach in which we combine self-assembled metal/ molecule nanostructures with chemically stable semiconductor surface layers. The resulting structures have well controlled dimensions and geometries (~ 4 nm Au nanoclusters) provided by the chemical self-assembly and have stable, low-resistance interfaces realized by the chemically stable semiconductor cap layer (low-temperature grown GaAs passivated by the organic tether molecules). Scanning tunneling microscope imaging and current-voltage spectroscopy of nanocontacts to n-GaAs fabricated using this approach indicate high quality, ohmic nanocontacts having a specific contact resistance of ~1 ¥ 10 -7 W · cm 2 and a maximum current density of ~1 ¥ 10 7 A/cm 2 , both comparable to those observed in large area contacts. Uniform 2-D arrays of these nanocontact structures have been fabricated and characterized as potential cells for nanoelectronic device applications.