“…In fabricating these sensors, metal oxide-based semiconducting materials such as SnO 2 , NiO, ZnO, Ga 2 O 3 , TiO 2 , In 2 O 3 , and tin-doped indium oxide (ITO) have been regarded as promising sensing materials for gas detection due to their high sensitivity and compatibility with conventional microelectronic fabrication process [6][7][8][9][10][11]. Among them, ITO-based gas sensors have shown high electrical conductivity and optical transparency while being used for the detection of diverse gases such as CH 3 OH, H 2 , NO 2 , CO, NH 3 , and HCHO due to its good sensitivity, low operating temperature, and good compatibility with standard IC fabrication [12][13][14][15][16][17][18][19][20][21][22][23][24][25]. Moreover, it can be utilized in smart window and wearable nose-sensor applications, where both high optical transparency and gas sensitivity are demanded [26,27].…”