On Bandwidth Characteristics of Tuning Fork  Micro-Gyroscope with Mechanically Coupled Sense Mode

Ni, Yunfang; Li, Hongsheng; Huang, Libin; Ding, Xu Chu; Wang, Haipeng

doi:10.3390/s140713024

Cited by 16 publications

(11 citation statements)

References 13 publications

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“…Its dual-mass structure can be considered as two independent gyroscopes with different ∆fs, and two sensing loops should be designed separately to expand the bandwidth. The left and right sensing modes coupled structures are investigated in [26,27,28]. The work in Ref.…”

Section: Development Of Dual-mass Mems Gyroscope Bandwidth Expansionmentioning

confidence: 99%

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Dual-Mass MEMS Gyroscope Structure, Design, and Electrostatic Compensation

Cao¹,

Li²

2018

MEMS Sensors - Design and Application

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Dual-mass MEMS gyroscope is one of the most popular inertial sensors. In this chapter, the structure design and electrostatic compensation technology for dual-mass MEMS gyroscope is introduced. Firstly, a classical dual-mass MEMS gyroscope structure is proposed, how it works as a tuning fork (drive anti-phase mode), and the structure dynamical model together with the monitoring system are presented. Secondly, the imperfect elements during the structure manufacture process are analyzed, and the quadrature error coupling stiffness model for dual-mass structure is proposed. After that, the quadrature error correction system based on coupling stiffness electrostatic compensation method is designed and evaluated. Thirdly, the dual-mass structure sensing mode modal is proposed, and the force rebalancing combs stimulation method is utilized to achieve sensing mode transform function precisely. The bandwidth of sensing open loop is calculated and experimentally proved as 0.54 times with the resonant frequency difference between sensing and drive modes. Then, proportional-integral-phase-leading controller is presented in sensing close loop to expand the bandwidth, and the experiment shows that the bandwidth is improved from 13 to 104 Hz. Finally, the results are concluded and summarized.

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Section: Development Of Dual-mass Mems Gyroscope Bandwidth Expansionmentioning

confidence: 99%

“…[27] analyzes the energy of gyroscope under in-phase and anti-phase modes. And literature [28] proposes that the real working sensing mode of gyroscope is formed by sensing in-phase and anti-phase modes. However, these works do not focus on the bandwidth method of this kind of sensing loop.…”

Section: Development Of Dual-mass Mems Gyroscope Bandwidth Expansionmentioning

confidence: 99%

Dual-Mass MEMS Gyroscope Structure, Design, and Electrostatic Compensation

Cao¹,

Li²

2018

MEMS Sensors - Design and Application

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“…The tuning fork micro-gyroscope operating at atmospheric pressure has large proof masses to increase the signal noise ratio of the Coriolis response and has a large drive force to increase the vibration amplitude in the viscous air. The simplified schematic of the tuning fork micro-gyroscope with mechanically coupled drive mode and sense mode is shown in Figure 1 [ 18 ]. The sense combs are configured as squeeze mode to improve the sensitivity.…”

Section: Imperfections Of the Tuning Fork Micro-gyroscope Operating Amentioning

confidence: 99%

“…The frequency response and the scale-factor of the gyroscopes have not been paid close attention in the literatures mentioned above. The frequency responses of gyroscopes with high Q -factor have been well studied [ 17 , 18 ]. However, as for gyroscopes operating at atmospheric pressure, the low Q -factor has a great impact on the characteristics of the frequency response and scale-factor.…”

Section: Introductionmentioning

confidence: 99%

Analysis of Frequency Response and Scale-Factor of Tuning Fork Micro-Gyroscope Operating at Atmospheric Pressure

Ding

et al. 2015

Sensors

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This paper presents a study of the frequency response and the scale-factor of a tuning fork micro-gyroscope operating at atmospheric pressure in the presence of an interference sense mode by utilizing the approximate transfer function. The optimal demodulation phase (ODP), which is always ignored in vacuum packaged micro-gyroscopes but quite important in gyroscopes operating at atmospheric pressure, is obtained through the transfer function of the sense mode, including the primary mode and the interference mode. The approximate transfer function of the micro-gyroscope is deduced in consideration of the interference mode and the ODP. Then, the equation describing the scale-factor of the gyroscope is also obtained. The impacts of the interference mode and Q-factor on the frequency response and the scale-factor of the gyroscope are analyzed through numerical simulations. The relationship between the scale-factor and the demodulation phase is also illustrated and gives an effective way to find out the ODP in practice. The simulation results predicted by the transfer functions are in close agreement with the results of the experiments. The analyses and simulations can provide constructive guidance on bandwidth and sensitivity designs of the micro-gyroscopes operating at atmospheric pressure.

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“…In the past several decades, with the advancements of the architecture, measuring and controlling technology, micro-gyroscopes have achieved rapid development. At present, they are widely adopted in many fields, including the automotive industry, consumer electronics, robot control systems, aerospace navigation and military weapons [1,2]. …”

Section: Introductionmentioning

confidence: 99%

Design and Implementation of a Dual-Mass MEMS Gyroscope with High Shock Resistance

Gao

Huang

Ding

et al. 2018

Sensors

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This paper presents the design and implementation of a dual-mass MEMS gyroscope with high shock resistance by improving the in-phase frequency of the gyroscope and by using a two-stage elastic stopper mechanism and proposes a Simulink shock model of the gyroscope equipped with the two-stage stopper mechanism, which is a very efficient method to evaluate the shock resistance of the gyroscope. The structural design takes into account both the mechanical sensitivity and the shock resistance. The design of the primary structure and the analysis of the stopper mechanism are first introduced. Based on the expression of the restoring force of the stopper beam, the analytical shock response model of the gyroscope is obtained. By this model, the shock response of the gyroscope is theoretically analyzed, and the appropriate structural parameters are obtained. Then, the correctness of the model is verified by finite element (FE) analysis, where the contact collision analysis is introduced in detail. The simulation results show that the application of the two-stage elastic stopper mechanism can effectively improve the shock resistance by more than 1900 g and 1500 g in the x- and y-directions, respectively. Finally, experimental verifications are carried out by using a machete hammer on the micro-gyroscope prototype fabricated by the deep dry silicon on glass (DDSOG) technology. The results show that the shock resistance of the prototype along the x-, y- and z-axes all exceed 10,000 g. Moreover, the output of the gyroscope can return to normal in about 2 s.

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On Bandwidth Characteristics of Tuning Fork Micro-Gyroscope with Mechanically Coupled Sense Mode

Cited by 16 publications

References 13 publications

Dual-Mass MEMS Gyroscope Structure, Design, and Electrostatic Compensation

Dual-Mass MEMS Gyroscope Structure, Design, and Electrostatic Compensation

Analysis of Frequency Response and Scale-Factor of Tuning Fork Micro-Gyroscope Operating at Atmospheric Pressure

Design and Implementation of a Dual-Mass MEMS Gyroscope with High Shock Resistance

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