2017
DOI: 10.1002/lpor.201600116
|View full text |Cite
|
Sign up to set email alerts
|

On‐chip laser processing for the development of multifunctional microfluidic chips

Abstract: In the development of microfluidic chips, conventional 2D processing technologies contribute to the manufacturing of basic microchannel networks. Nevertheless, in the pursuit of versatile microfluidic chips, flexible integration of multifunctional components within a tiny chip is still challenging because a chip containing micro‐channels is a non‐flat substrate. Recently, on‐chip laser processing (OCLP) technology has emerged as an appealing alternative to achieve chip functionalization through in situ fabrica… Show more

Help me understand this report

Search citation statements

Order By: Relevance

Paper Sections

Select...
3
1
1

Citation Types

0
30
0

Year Published

2017
2017
2022
2022

Publication Types

Select...
7

Relationship

0
7

Authors

Journals

citations
Cited by 63 publications
(30 citation statements)
references
References 211 publications
(270 reference statements)
0
30
0
Order By: Relevance
“…In this way, very small feature sizes of less than 100 nm can be achieved . Microstructures prepared via DLW have for example been used in microfluidic chips, metamaterials, or as 3D microscaffolds for cell and tissue engineering . Commercial resist mixtures are available that are well suited for the rapid generation of stable structures.…”
Section: Methodsmentioning
confidence: 99%
“…In this way, very small feature sizes of less than 100 nm can be achieved . Microstructures prepared via DLW have for example been used in microfluidic chips, metamaterials, or as 3D microscaffolds for cell and tissue engineering . Commercial resist mixtures are available that are well suited for the rapid generation of stable structures.…”
Section: Methodsmentioning
confidence: 99%
“…Materials suitable for fabricating microfluidic chips are usually polymers, glass, silicon, metals, etc. Complex microfluidic channels can be readily fabricated through the combined technologies of lithography and etching . Imprinting and soft lithography technologies have been successfully adopted to efficiently manufacture polymer‐based microfluidic chips.…”
Section: Lspr‐based Poct Devices and Their Applicationmentioning
confidence: 99%
“…In addition to tiny structures processed directly on the surface of any type of material, it is also possible for processing inside the bulk of transparent materials to allow the integration of actuators and optical sensors into the microfluidic device without bonding substrates and fabricating lab‐on‐a‐chip devices . Due to extremely high intensities obtained by ultrashort pulses, it is also possible to change the tribological, chemical, and physical properties of surfaces …”
Section: Introductionmentioning
confidence: 99%
“…[12] Among the techniques available for fabrication of microreactors with serpentine channels and T-junctions, femtosecond laser ablation has been drawing attention because it allows machining of a variety of materials, including metals, glass, and ceramics. [14][15][16][17][18] Mechanical micromachining and electric discharge machining wear out the equipment used in the process, while a focused ion beam machining is performed under vacuum; such techniques also require small etching velocities, not allowing fast prototyping. [19] Lithography methods and deep reactive ion etching were adapted from the microelectro-mechanical-systems (MEMS) manufacturing, but are still expensive and complex to operate.…”
Section: Introductionmentioning
confidence: 99%
See 1 more Smart Citation