2020
DOI: 10.2116/analsci.20a003
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On-line Measurement of Sub-ppb Level Hydrogen Peroxide in Ultrapure Water Production Process

Abstract: An on-line H O 2 analyzer was developed for application to the ultrapure water production process, using a gasometric method. The analyzer consists of a dissolved oxygen (DO) sensor and analyzer, a catalyst that converts H 2 O 2 to O 2 , and a computer that stores the DO data. H 2 O 2 concentrations were calculated by measuring the change in DO concentration before and after the catalyst and using the calculation formula presented in this study. In order to accurately analyze a sub-ppb level of H 2 O 2 , a DO … Show more

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“…It was noted that the vehicle control still displayed luminescence emission above baseline and higher than the instrument blank. We hypothesized that this could be due to residual hydrogen peroxide in the water used to prepare stock solutions for hydrogen peroxide calibration . This was confirmed by performing a control experiment with the addition of 2 U mL –1 catalase, an enzyme that catalytically decomposes hydrogen peroxide (Figure B).…”
Section: Resultsmentioning
confidence: 99%
“…It was noted that the vehicle control still displayed luminescence emission above baseline and higher than the instrument blank. We hypothesized that this could be due to residual hydrogen peroxide in the water used to prepare stock solutions for hydrogen peroxide calibration . This was confirmed by performing a control experiment with the addition of 2 U mL –1 catalase, an enzyme that catalytically decomposes hydrogen peroxide (Figure B).…”
Section: Resultsmentioning
confidence: 99%