Pressure-driven phase transition in metals has been a hot topic because it is an effective means to induce fresh phase, benefit of tuning the properties of materials. Herein, CoNiFe, CoNiCr, and CoNiV multi-principal element alloys (MPEAs) were investigated by an in situ high-pressure x-ray diffraction technique. It is found that the pressure-induced phase transition from face-centered cubic to hexagonal close-packed phase occurs at 15.60, 13.84, and 8.20 GPa, respectively. The atomic size misfit of CoNiFe, CoNiCr, and CoNiV MPEAs is estimated to be 0.653%, 2.077%, and 3.013%, respectively, illustrating that the lattice distortion degree is increasing. The increase in lattice distortion can decrease the initial phase-transition-pressure because lattice distortion could reduce the strain to nucleate Shockley partial dislocation, which promotes the formation of a stacking fault (SF) stack of three atomic layers with hcp stacking. However, the quantitative calculation of stacking fault probability α as a function of pressure demonstrates that the probability of SF formation gradually increases in order of CoNiFe, CoNiCr, and CoNiV, which is in line with the critical pressure of phase transition decreasing orderly. Furthermore, the first peak in the pair distribution function curve after entirely decompression not fully reverts to its initial state, proving the densification of MPEAs under pressure. These findings provide an innovative light for understanding pressure-induced phase transitions in MPEAs.