2005
DOI: 10.1016/j.tsf.2005.04.011
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On the correlation between morphology and gas sensing properties of RGTO SnO2 thin films

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Cited by 20 publications
(12 citation statements)
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“…to NO 2 ) can be increased by optimizing the deposition temperature and thus the substrate surface coverage of Sn droplets. [122] Integration of RGTO-films in micromachined sensor substrates and deposition of Au nanoparticles over the SnO 2 film (Figure 12) has led to successful detection of C 6 H 6 and NO 2 in the ppb range. [14] …”
Section: Spray Pyrolysismentioning
confidence: 99%
“…to NO 2 ) can be increased by optimizing the deposition temperature and thus the substrate surface coverage of Sn droplets. [122] Integration of RGTO-films in micromachined sensor substrates and deposition of Au nanoparticles over the SnO 2 film (Figure 12) has led to successful detection of C 6 H 6 and NO 2 in the ppb range. [14] …”
Section: Spray Pyrolysismentioning
confidence: 99%
“…Die Sensorreaktion (z. B. auf NO 2 ) lässt sich durch die Optimierung der Abscheidungstemperatur, d. h. der Bedeckung der Substratoberfläche mit Sn‐Tröpfchen, noch weiter steigern 122. Der Einbau von RGTO‐Filmen in das Substrat eines Mikrosensors und die Abscheidung von Au‐Nanopartikeln auf einem SnO 2 ‐Film (Abbildung 12) ermöglichte die Detektion von C 6 H 6 und NO 2 im ppb‐Bereich 14…”
Section: Herstellung Von Sensorfilmenunclassified
“…Various shapes of nanostructured SnO 2 , including nano-particle-based films [12][13][14][15][16], nano-wires [17][18][19], nano-belts [20,21], nano-rods [22], and selfassembled or pattern-transferred nano-porous structures [23,24], were fabricated and studied for their gas-sensing properties. Currently there are several fabrication approaches for preparation of nano-structured SnO 2 for gas detections, such as sol-gel [12,13,15,[25][26][27], pyrolysis [28][29][30], sputtering [14,31], chemical vapor deposition [32], rheotaxial growth and thermal oxidation (RGTO) [33][34][35][36][37][38][39][40][41][42], etc. Among these processes, RGTO, in which SnO 2 is formed by oxidizing metallic tin films deposited on certain substrates in dry environments, has an advantage in obtaining high aspect-ratio nano-structures [33,42] and controlling the particle size distribution [35].…”
Section: Introductionmentioning
confidence: 99%
“…However, most of the reported SnO 2 devices prepared through RGTO were focused on NO x or CO detections [33,34,[36][37][38]40,41]. Although there were some studies concerning about H 2 -sensing by RGTO-fabricated SnO 2 thin films, either the response magnitude was too low [42] as comparing to the micron-thick un-doped SnO 2 films consisting of nano-particles prepared by sol-gel or pyrolysis [25,28], or the operation temperature is too high (e.g., 450-530 • C [33]), or detailed sensing properties were absent [33,35].…”
Section: Introductionmentioning
confidence: 99%