2017
DOI: 10.1134/s1027451017040139
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On the creation of ordered nuclei by ion bombardment for obtaining nanoscale si structures on the surface of CaF2 films

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Cited by 21 publications
(8 citation statements)
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“…When implanting small doses (D  10 16 ioncm -2 ) of the alloying element, dilute ion-implanted alloys with an impurity element concentration of ~ 1 at. % are formed [10][11][12][13][14][15]. The depth of the maximum content of the alloying element in the surface layer of the crystal is mainly determined by the ion energy of the impurity element [17,18].…”
Section: Resultsmentioning
confidence: 99%
“…When implanting small doses (D  10 16 ioncm -2 ) of the alloying element, dilute ion-implanted alloys with an impurity element concentration of ~ 1 at. % are formed [10][11][12][13][14][15]. The depth of the maximum content of the alloying element in the surface layer of the crystal is mainly determined by the ion energy of the impurity element [17,18].…”
Section: Resultsmentioning
confidence: 99%
“…In this paper, using the example of implantation of low-energy Mo and Zr ions in a single crystal Nb (110), we study the change in the spectral dependence of the quantum photoemission yield (QPhY). The value of the photoemission work of the output is found, and the features of the formation of photoelectron spectra of N(E) in the near and vacuum ultraviolet are studied [1][2][3][4][5][6][7][8].…”
Section: Introductionmentioning
confidence: 99%
“…Во многих случаях в качестве упорядоченных зародышей могут использоваться специально созданные дефекты или реконструированная поверхность монокристалла. Наши предварительные исследования показали [12], что такие дефекты можно создавать методом низкоэнергетической и низкодозной ионной бомбардировки в сочетании с отжигом.…”
Section: Introductionunclassified
“…* -эпитаксиальный рост. с диаметрами d ≈ 10−15 nm, а расстояния между их центрами составляют 50−70 nm[12]. При θ = 8 поверхностные размеры фаз увеличиваются до 30−50 nm, а их высота h составляет 1.5−2 nm (рис.…”
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