1998
DOI: 10.1016/s0019-0578(98)00007-x
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On the design of piezoelectric sensors and actuators

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Cited by 17 publications
(3 citation statements)
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“…As pointed out by Luck and Agba [3], the operating condition of the cylindrical piezoelectric actuator can be considered isothermal. This assumption is suitable when the piezoelectric tube takes a slowly varying or quasi-static motion so that its electric field and isothermal conditions are close to dE = dT ≈ 0.…”
Section: Measurement Of Speed Of Soundmentioning
confidence: 99%
“…As pointed out by Luck and Agba [3], the operating condition of the cylindrical piezoelectric actuator can be considered isothermal. This assumption is suitable when the piezoelectric tube takes a slowly varying or quasi-static motion so that its electric field and isothermal conditions are close to dE = dT ≈ 0.…”
Section: Measurement Of Speed Of Soundmentioning
confidence: 99%
“…Therefore, piezoelectric elements are commonly chosen due to fast response, small size, lack of electromagnetic interference, large thrust, fast reaction rate, and high precision. Piezoelectric elements therefore find common application in positioning systems [1,2,3], atomic force microscopy (AFM) [4] and in inertia motors. Because the elongation of piezoelectric elements is short, scientists design flexure structures [5,6,7,8,9] or inertial sliders [10,11] to increase the displacement indirectly.…”
Section: Introductionmentioning
confidence: 99%
“…Recently, for a small range of motion, flexure systems seem to be able to satisfy many positioning requirements. An example is a piezoelectric actuator [1][2][3] which can realize 10 nm resolution with 1 µm travel. On the other hand, larger range positioners, such as the steppers in IC-lithography, are based on devices with ball-screws or linear motors [4,5].…”
Section: Introductionmentioning
confidence: 99%