On the low-temperature growth mechanism of single walled carbon nanotubes in plasma enhanced chemical vapor deposition

Shariat, M.; Shokri, Babak; Neyts, Erik C.

doi:10.1016/j.cplett.2013.10.061

Cited by 19 publications

(16 citation statements)

References 49 publications

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“…We also found that the effect of the ion density on carbon loss near the nanotube base is small. Note that the ion bombardment experiments and atomistic simulations reveal that the ion bombardment in a suitable energy range allows structural defects to be healed resulting in an enhanced nucleation of the carbon nanotube cap …”

Section: Resultsmentioning

confidence: 99%

Long, Vertically Aligned Single-Walled Carbon Nanotubes from Plasmas: Morpho-Kinetic and Alignment Controls

Бурмака

Denysenko

Ostrikov

et al. 2014

Plasma Process. Polym.

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The enhanced large‐scale model and numerical simulations are used to clarify the growth mechanism and the differences between the plasma‐ and neutral gas‐grown carbon nanotubes, and to reveal the underlying physics and the key growth parameters. The results show that the nanotubes grown by plasma can be longer due to the effects of hydrocarbon ions with velocities aligned with the nanotubes. We show that the low‐temperature growth is possible when the hydrocarbon ion flux dominates over fluxes of other species. We have also analysed the dependencies of the nanotube growth rates on nanotube and process parameters. The results are verified by a direct comparison with the experimental data. The model is generic and can be used for other types of carbon nanostructures such as carbon nanowalls, vertical graphenes, etc.

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Section: Resultsmentioning

confidence: 99%

Long, Vertically Aligned Single-Walled Carbon Nanotubes from Plasmas: Morpho-Kinetic and Alignment Controls

Бурмака

Denysenko

Ostrikov

et al. 2014

Plasma Process. Polym.

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“…As is the case for plasma catalysis, it is the combination of the required long time scales and the necessity to simultaneously take into account the various plasma factors that render such simulations highly challenging. Nevertheless, some progress was already made, in particular regarding the effect of adding an electric field, and the effect of low energy ion bombardment . MD simulations using the ReaxFF force field demonstrated that the effect of adding a static electric field was to gently drive the carbon atoms toward the tip of the nanocatalyst.…”

Section: Selected Applicationsmentioning

confidence: 99%

Molecular Dynamics Simulations for Plasma‐Surface Interactions

Neyts

Brault

2016

Plasma Processes & Polymers

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Plasma‐surface interactions are in general highly complex due to the interplay of many concurrent processes. Molecular dynamics simulations provide insight in some of these processes, subject to the accessible time and length scales, and the availability of suitable force fields. In this introductory tutorial‐style review, we aim to describe the current capabilities and limitations of molecular dynamics simulations in this field, restricting ourselves to low‐temperature non‐thermal plasmas. Attention is paid to the simulation of the various fundamental processes occurring, including sputtering, etching, implantation, and deposition, as well as to what extent the basic plasma components can be accounted for, including ground state and excited species, electric fields, ions, photons, and electrons. A number of examples is provided, giving an bird's eye overview of the current state of the field.

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“…that underlie their instrument application [20,24]. In practice, CNT arrays are most often grown on nanoscale СС obtained by coagulation of a nanoscale thickness metal film during annealing [25,26]. For exclusion of the interaction between the CC and the substrate, it is necessary to form buffer layers based on metal or dielectric films.…”

Section: Introductionmentioning

confidence: 99%

Vertically Aligned Carbon Nanotubes Production by PECVD

Il’in¹,

Il’ina²,

Rudyk³

et al. 2019

Perspective of Carbon Nanotubes

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This chapter presents the results of experimental studies of the PECVD technological mode parameters' influence on the formation of catalytic centers and carbon nanotubes' (CNTs') growth processes. This chapter also presents the ability to regulate the growth parameter for the controlled production of CNTs with the required geometric parameters, properties, and growth mechanisms. The results of experimental studies of the heating temperature and activation time effects on the catalytic center formation will be presented. This chapter also shows the effects of growth temperature, heating rate, and the activation time on the geometric and structural parameters of the carbon nanotubes. Experimental studies were carried out with the use of AFM, SEM, TEM, and EXAFS techniques. The results can be used in the development of technological processes for creating ultrafast energy-efficient electronic component base with carbon nanostructures, particularly nanoelectromechanical switches, flexoand piezoelectric generators, gas sensors, and high-performance emitters.

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On the low-temperature growth mechanism of single walled carbon nanotubes in plasma enhanced chemical vapor deposition

Cited by 19 publications

References 49 publications

Long, Vertically Aligned Single-Walled Carbon Nanotubes from Plasmas: Morpho-Kinetic and Alignment Controls

Long, Vertically Aligned Single-Walled Carbon Nanotubes from Plasmas: Morpho-Kinetic and Alignment Controls

Molecular Dynamics Simulations for Plasma‐Surface Interactions

Vertically Aligned Carbon Nanotubes Production by PECVD

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