One-bodied humidity and temperature sensor having advanced linearity at low and high relative humidity range

Park, Sekwang; Kang, Jeongho; Park, Jinsu; Mun, Suhwan

doi:10.1016/s0925-4005(01)00611-6

Cited by 50 publications

(11 citation statements)

References 2 publications

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“…6 The accommodation of these types of properties in a unique microdevice requires necessarily the choice of capacitive long-monitoring humidity sensors enabling us to screen changes in the surrounding environment with large output signals and low power consumption as well as to manage apparatus working like moisture exchangers when variations take place in the surrounding atmosphere. 7,8 Similarly, adaptive materials have been suggested to regulate moisture transfer without having long-distance revealing functions. 7,8 Similarly, adaptive materials have been suggested to regulate moisture transfer without having long-distance revealing functions.…”

Section: Introductionmentioning

confidence: 99%

Integrated carboxylic carbon nanotube pathways with membranes for voltage-activated humidity detection and microclimate regulation

et al. 2015

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This work describes some single walled carboxylic carbon nanotubes with outstanding transport properties when assembled in a 3D microarray working like a humidity membrane-sensor and an adjustable moisture regulator. Combined nano-assembly approaches are used to build up a better quality pathway through which assisted-charge and mass transport synchronically takes place. The structure-electrical response relationship is found, while controllable and tunable donor-acceptor interactions established at material interfaces are regarded as key factors for the accomplishment of charge transportation, enhanced electrical responses and adjustable moisture exchange. Raman and infrared spectroscopy provides indications about the fine structural and chemical features of the hybrid-composite membranes, resulting in perfect agreement with related morphology and electrical properties. Enhanced and modular electrical response to changes in the surrounding atmosphere is concerned with doping events, while assisted moisture regulation is discussed in relation to swelling and hopping actions. The electro-activated hybrid-composite membrane proposed in this work can be regarded as an attractive 'sense-to-act' precursor for smart long-distance monitoring systems with capability to adapt itself and provide local comfortable microenvironments.

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Section: Introductionmentioning

confidence: 99%

Integrated carboxylic carbon nanotube pathways with membranes for voltage-activated humidity detection and microclimate regulation

et al. 2015

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“…Most literature sources agree that a thickness equivalent to the electrode pitch should be sufficient to capture virtually all of the electric fringe fields. 12,14 This number was confirmed through two-dimensional ͑2-D͒ finite element simulations of the electromagnetic fields using Maxwell 2-D simulation software from Ansoft Corporation, as depicted in Figure 4. In these simulations, a 2-D model consisting of the cross section of two electrode half-widths separated by the electrode spacing was utilized.…”

Section: Resultsmentioning

confidence: 77%

“…This technique is based on the use of interdigitated electrodes ͑IDEs͒ as chemical sensors. Interdigitated electrodes have served this role well in the past as humidity sensors 12 and bio-sensors. 13 The idea discussed in this paper is very similar.…”

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confidence: 99%

Using Interdigitated Electrodes for Measuring Photoacid Generator Kinetics in Chemically Amplified Resists

Berger

Byers

Henderson

2004

J. Electrochem. Soc.

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In this work, the feasibility of using interdigitated electrodes to measure the kinetics of photoacid generation in a resist film has been examined. Interdigitated electrodes provide a quick, noninvasive, nondestructive alternative to traditional Dill C measurement techniques and unlike traditional techniques is easily performed in a wafer fab environment. The initial results indicate that the interdigitated electrodes ͑IDEs͒ used in this work are capable of both detecting the small quantities of acid generated by photoacid generators ͑PAGs͒ at loadings typical of those found in chemically amplified resists and quantifying the amount of acid generated during exposure. In addition, a linear relationship has been observed between measured IDE capacitance and both PAG and photoacid content. This relationship has been utilized to determine the Dill C parameter from the measured IDE capacitance response vs. exposure dose for films consisting of triphenylsulfonium triflate ͑TPS-Tf͒ in a poly͑hydroxystyrene͒ ͑PHOST͒ matrix. A Dill C value of 0.0445 cm 2 /mJ was measured for TPS-Tf in PHOST, which is in agreement with literature values for similar PAG-polymer systems.As the microelectronics industry has strived for smaller and smaller feature sizes, the lithographic techniques utilized to print these features have become increasingly complex. As a result, the number of process variables that can have a significant impact upon the quality of the lithographic process is quite large. The fabrication time and associated costs for running lithography experiments designed to test these complex processes are impractical for a semiconductor manufacturer to absorb and still maintain a competitive position in the industry. The use of lithography simulation software can provide a means to explore such lithography process space and its use has steadily increased in importance in recent years.The use of simulations provides many advantages to the user. First, simulations significantly reduce the number of experiments that the user must perform to fully understand the lithographic process. This reduces process development time and cost substantially. Second, simulations allow the user to plan ahead for the lithography processes needed in the future by simulating the behavior of materials and processes not yet realized. Despite their many advantages, simulations are only as useful and accurate as the physical model parameters on which they are based. In order for lithography simulations to have true predictive capability, it is imperative that the models used in the simulation routines are provided with accurate physical parameters. One such parameter often sought for modeling chemically amplified photoresists, and the focus of the research reported in this paper, is the Dill C parameter.Positive-tone chemically amplified photoresists rely on a twostep mechanism to achieve imaging in the resist film. 1 First, exposure to UV radiation causes a photoacid generator ͑PAG͒ to decompose and produce an acid within the film. Second, the photog...

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“…According to increase relative humidity in environment, the coated hygroscopic layer is expanded. Therefore, the resistance of piezoresistors on diaphragm increases and is detected by electrical circuits [7]. Fabrication processes are followed by standard cleaning, thermal oxidation, patterning of resistors, diffusion, Al evaporation, back side etching, cutting, wire bonding and packaging.…”

Section: Multi Sensor Design and Fabricationmentioning

confidence: 99%

Integrated Comfort Sensing System for Indoor Activity

Kang¹

2006

2006 SICE-ICASE International Joint Conference

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This research is about an integrated comfort sensing system on indoor climate using humidity, temperature and air flow sensors with integrated driving and amplifying circuit. The comfort sensing appears to be highly sensitive to temperature and air flow. We have designed and fabricated an one-bodied humidity/temperature sensor and a flow sensor. In order to drive sensors and amplify signals, ASIC chip has been designed and integrated by CMOS technology. Because first ASIC chip was not good for driving and amplifying signals, we designed and fabricated a different OP-AMP cell of the circuit. Micro-controller calculates a PMV (predicted mean vote) and CSV (comfort sensing vote) with sensing signals and display a PMV on LCD (liquid crystal display) for human comfort on indoor climate. Our work has demonstrated that an integrated comfort sensing system can provide an effective means of measuring the indoor comfort sensing index of a human being. Experimental results with simulated environment clearly suggest that our sensing system can be used in many applications such as an air conditioning system, feedback controlling in automobile, home and hospital etc..

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One-bodied humidity and temperature sensor having advanced linearity at low and high relative humidity range

Cited by 50 publications

References 2 publications

Integrated carboxylic carbon nanotube pathways with membranes for voltage-activated humidity detection and microclimate regulation

Integrated carboxylic carbon nanotube pathways with membranes for voltage-activated humidity detection and microclimate regulation

Using Interdigitated Electrodes for Measuring Photoacid Generator Kinetics in Chemically Amplified Resists

Integrated Comfort Sensing System for Indoor Activity

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