One-dimensional modelling of low-frequency and high-pressure Xe barrier discharges for the design of excimer lamps

Oda, Akinori; Sakai, Yosuke; Akashi, Hidetoshi; Sugawara, Hirotake

doi:10.1088/0022-3727/32/21/304

Cited by 83 publications

(42 citation statements)

References 39 publications

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“…The detail of the numerical scheme is based on earlier works. [18][19][20][21] The number densities n j of electrons, neutrals and ions ͑subscript j represents species͒ are calculated spatiotemporally by the following continuity equations:…”

Section: Plasma Modelingmentioning

confidence: 99%

Predicting the amount of carbon in carbon nanotubes grown by CH4 rf plasmas

Okita

Suda

Ozeki

et al. 2006

Journal of Applied Physics

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Carbon nanotubes ͑CNTs͒ were grown on Si substrates by rf CH 4 plasma-enhanced chemical vapor deposition in a pressure range of 1 -10 Torr, and then characterized by scanning electron microscopy. At 1 Torr, the CNTs continued growing up to 60 min, while their height at 4 Torr had leveled off at 20 min. CNTs hardly grew at 10 Torr and amorphous carbon was deposited instead. CH 4 plasma was simulated using a one-dimensional fluid model to evaluate the production and transport of radicals, ions, and nonradical neutrals. The amount of simulated carbon supplied to the electrode surface via the flux of radicals and ions such as CH 3 , C 2 H 5 , and C 2 H 5 + was consistent with estimations from experimental results.

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Section: Plasma Modelingmentioning

confidence: 99%

Predicting the amount of carbon in carbon nanotubes grown by CH4 rf plasmas

Okita

Suda

Ozeki

et al. 2006

Journal of Applied Physics

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“…These barriers are in series with the confined gas. The electrical model of the gas behavior is given by a gas capacitance (C g ) in parallel with a gas conductance (G) [9]. The gas conductance G is very small when the absolute value of the gas voltage is smaller than that the gas breakdown voltage (V th ): the equivalent model of the DBD is thus the series association of C d and C g (C eq ).…”

mentioning

confidence: 99%

Efficiency of an Exciplex DBD Lamp Excited Under Different Methods

Florez¹,

Schitz²,

Piquet³

et al. 2018

IEEE Trans. Plasma Sci.

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OATAO is an open access repository that collects the work of Toulouse researchers and makes it freely available over the web where possible. Abstract-Three different electrical generators have been designed and used to supply an exciplex dielectric barrier discharge lamp in order to elucidate the influence of each one of these supplying strategies over the system performance; the first method consists on supplying the lamp with short bipolar voltage pulses; the second and third methods are based on semiresonant converters were current pulses, of controlled duration and magnitude, are injected into the lamp. For each one of the generators, measurements of the lamp and supply efficiency, are performed and analyzed, at different levels of power (up to 130 W) and operating frequencies (60-90 kHz). From the experimental results, the pulsed voltage-mode approach has allowed obtaining the highest lamp efficiency (7%), yet the maximum supply efficiency is offered by the resonant mode supplies. On the basis of the lamp and the supply efficiencies, the whole system performance is analyzed.Index Terms-Dielectric-barrier discharge (DBD), exciplex lamp, pulsed voltage, resonant converter, ultraviolet.

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“…In the current study, we have selected the xenon plasma chemistry that is basically the same as that used in Oda et al [10], which consists of 9 species and 24 reaction channels, as listed in Table 1. These reaction channels included electron-neutral elastic collision (No.…”

Section: Xenon Plasma Chemistrymentioning

confidence: 99%

“…A dramatic increase in efficiencies of up to 40 % has been demonstrated experimentally (included transmission losses through the quartz and geometric loss) by using short pulsed voltages (<750 ns) interrupted by long idle periods (∼ 40 μs) [9]. Simulation of xenon DBD driven by sinusoidal voltage waveforms using the one-dimensional planar fluid modeling has been proposed with gas pressures and frequencies in the range of 10-400 torr and 50 kHz -1 MHz, respectively, by Oda et al [10]. Zvereva and Gerasimov [11] computed the species population in a xenon barrier discharge under various E/Ns.…”

Section: Introductionmentioning

confidence: 99%

Enhancement of VUV Emission from a Coaxial Xenon Excimer Ultraviolet Lamp Driven by Distorted Bipolar Square Voltages

Jou

Hung

Chiu

et al. 2011

Contrib. Plasma Phys.

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Enhancement of vacuum UV emission (172 nm VUV) from a coaxial xenon excimer UV lamp (EUV) driven by distorted 50 kHz bipolar square voltages, as compared to that by sinusoidal voltages, is investigated numerically in this paper. A self-consistent radial one-dimensional fluid model, taking into consideration non-local electron energy balance, is employed to simulate the discharge physics and chemistry. The discharge is divided into two three-period portions; these include: the pre-discharge, the discharge (most intense at 172 nm VUV emission) and the post-discharge periods. The results show that the efficiency of VUV emission using the distorted bipolar square voltages is much greater than when using sinusoidal voltages; this is attributed to two major mechanisms. The first is the much larger rate of change of the voltage in bipolar square voltages, in which only the electrons can efficiently absorb the power in a very short period of time. Energetic electrons then generate a higher concentration of metastable (and also excited dimer) xenon that is distributed more uniformly across the gap, for a longer period of time during the discharge process. The second is the comparably smaller amount of "wasted" power deposition by Xe + 2 in the post-discharge period, as driven by distorted bipolar square voltages, because of the nearly vanishing gap voltage caused by the shielding effect resulting from accumulated charges on both dielectric surfaces.

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One-dimensional modelling of low-frequency and high-pressure Xe barrier discharges for the design of excimer lamps

Cited by 83 publications

References 39 publications

Predicting the amount of carbon in carbon nanotubes grown by CH4 rf plasmas

Predicting the amount of carbon in carbon nanotubes grown by CH4 rf plasmas

Efficiency of an Exciplex DBD Lamp Excited Under Different Methods

Enhancement of VUV Emission from a Coaxial Xenon Excimer Ultraviolet Lamp Driven by Distorted Bipolar Square Voltages

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