Oxygen conductors and transporters are important to several
consequential
renewable energy technologies, including fuel cells and syngas production.
Separately, monolayer transition-metal dichalcogenides (TMDs) have
demonstrated significant promise for a range of applications, including
quantum computing, advanced sensors, valleytronics, and next-generation
optoelectronics. Here, we synthesize a few-nanometer-thick Bi
x
O
y
Se
z
compound that strongly resembles a rare R
m bismuth oxide
(Bi2O3) phase and combine it with monolayer
TMDs, which are highly sensitive to their environment. We use the
resulting 2D heterostructure to study oxygen transport through Bi
x
O
y
Se
z
into the interlayer region, whereby the 2D material
properties are modulated, finding extraordinarily fast diffusion near
room temperature under laser exposure. The oxygen diffusion enables
reversible and precise modification of the 2D material properties
by controllably intercalating and deintercalating oxygen. Changes
are spatially confined, enabling sub-micrometer features (e.g., pixels),
and are long-term stable for more than 221 days. Our work suggests
few-nanometer-thick Bi
x
O
y
Se
z
is a promising unexplored room-temperature
oxygen transporter. Additionally, our findings suggest that the mechanism
can be applied to other 2D materials as a generalized method to manipulate
their properties with high precision and sub-micrometer spatial resolution.