Abstruct-For the integrated optic erbium-doped phosphate silica amplifier, a comprehensive model is presented which includes high-concentration dissipative ion-ion interactions. Based on actual waveguide parameters, the model is seen to reproduce measured gains closely. A rigorous design optimization is performed, and the influence of variations in the launched pump power, the core cross section, the waveguide length, the erbium concentration, and the background losses are evaluated. Optimal design proposals are given, and the process reproducibility of the proposed optimal design is examined. Requirements for process parameter control in me wafer fabrication are set up.