Optical and electrical investigation of DC micro-hollow cathode discharge in He/O2 and He/H2 mixture

Abstract

A hollow cathode discharge source was developed using a negatively biased micro-hole cathode to generate high density point-like plasma. Through electrical and optical investigations, the properties of gas discharge plasmas such as dissipated power, electronic excitation temperature, and rotational temperature were compared in glow and hollow cathode discharge conditions. In the hollow cathode discharge mode, the power consumption and excitation temperature were larger. It was also observed that the relatively higher intensity of vacuum ultraviolet (VUV) oxygen triple lines in He/O2 plasma and VUV hydrogen Lyman-α line in He/H2 plasma were realized in the hollow cathode discharge mode.

The influence of oxygen concentration on the hollow cathode discharge in He/O2 mixed gas

“…Saloum measured the relative density of the O atom of Ar/O 2 remote plasma excited in a low-pressure hollow cathode discharge system [18]. Cho studied the optical and electrical properties of hollow discharge plasmas in He/O 2 at different discharge modes [19].…”

Range and similarity of hollow cathode discharge in argon

“…This phenomenon was first observed by Townsend in 1953 [1] and later was called 'hollow cathode effect' or 'hollow cathode mode' (HCM) [2]. Although HCM has been found for >60 years, many investigations on HCD are still performed [3][4][5][6][7][8][9][10][11][12][13].…”