Optical and electrical properties of capacitive coupled radio frequency Ar-H2 mixture discharge at the low pressure

Tanışlı, Murat; Şahi̇n, Nesli̇han; Younus, Muhammad; Rehman, Najeeb Ur; Demir, Süleyman

doi:10.1063/1.4999401

Cited by 8 publications

(4 citation statements)

References 26 publications

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“…Data of Ar spectral lines. [28] λ i j (nm) Figure 3 shows the variations of electron temperature with power at four different frequencies and 4 mTorr. The results clearly show the electron temperatures decrease with the increase of power at different frequencies.…”

Section: Resultsmentioning

confidence: 99%

“…where X 1i is the rate coefficient describing electron impact excitation from the ground level 1 to level i, [28][29][30]32] ∑ i> j A i j is the accumulative transition probability for spontaneous emission from the higher level i to all the other lower levels j, and N e , N 1 , N i are the electron density, ground level population density, and excited state population density, respectively.…”

Section: Calculated Methods Of Electron Temperaturementioning

confidence: 99%

“…Note, we suppose the plasma is optically thin. Furthermore, X 1i can be expressed as a simple expression related to T e [28][29][30][31][32]…”

Section: Calculated Methods Of Electron Temperaturementioning

confidence: 99%

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Discharge characteristic of very high frequency capacitively coupled argon plasma*

Yin¹,

Wang²,

Gao³

et al. 2021

Chinese Phys. B

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The discharge characteristics of capacitively coupled argon plasmas driven by very high frequency discharge are studied. The mean electron temperature and electron density are calculated by using the Ar spectral lines at different values of power (20 W–70 W) and four different frequencies (13.56 MHz, 40.68 MHz, 94.92 MHz, and 100 MHz). The mean electron temperature decreases with the increase of power at a fixed frequency. The mean electron temperature varies non-linearly with frequency increasing at constant power. At 40.68 MHz, the mean electron temperature is the largest. The electron density increases with the increase of power at a fixed frequency. In the cases of driving frequencies of 94.92 MHz and 100 MHz, the obtained electron temperatures are almost the same, so are the electron densities. Particle-in-cell/Monte-Carlo collision (PIC/MCC) method developed within the Vsim 8.0 simulation package is used to simulate the electron density, the potential distribution, and the electron energy probability function (EEPF) under the experimental condition. The sheath width increases with the power increasing. The EEPF of 13.56 MHz and 40.68 MHz are both bi-Maxwellian with a large population of low-energy electrons. The EEPF of 94.92 MHz and 100 MHz are almost the same and both are nearly Maxwellian.

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Section: Resultsmentioning

confidence: 99%

Section: Calculated Methods Of Electron Temperaturementioning

confidence: 99%

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Discharge characteristic of very high frequency capacitively coupled argon plasma*

Yin¹,

Wang²,

Gao³

et al. 2021

Chinese Phys. B

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show abstract

“…Elektron sıcaklığı ve elektron yoğunluğu, düşük basınçlı deşarjların çalışma koşullarını belirlemek için en önemli plazma parametreleridir. Bu özelliklerin belirlenmesinde OES tekniği kullanılabilmektedir [25][26][27][28]. Bu yöntem elektromanyetik ışıma ve madde arasındaki etkileşimden yararlanmaktadır [29].…”

Section: Introductionunclassified

The Properties of Inductive Coupled Radio-Frequency Neon Flowing Discharge at Low-Pressure

Şahi̇n¹

2019

Süleyman Demirel Üniversitesi Fen Edebiyat Fakültesi Fen Dergisi

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Özet: İndüktif olarak bağlı radyo-frekans (RF) deşarj odasında 0,17 mbar ile 1,4 mbar arasındaki basınçlarda bulunan neon (Ne) deşarjını karakterize etmek için optik emisyon spektrumları kullanılmıştır. 13,56 MHz frekansında 100, 160 ve 200 W çıkış güçlerinde çalışan RF güç kaynağı ile kuvars deşarj odasının iki farklı bölgesinde saf neon gazının akan deşarjı elde edilmiştir. Bu farklı iki bölgenin optik emisyon spektrumları 200-1200 nm dalga boyları aralığında elde edilmiştir. Amaç seçilen iki farklı bölge için ayrı ayrı plazma optik özellikleri belirlemektir. Neon akan deşarjı için elde edilen spektral çizgiler 585,248 ve 724,516 nm dalga boyları arasındadır. İndüktif bağlı deşarj sisteminde yaklaşık 0,77 mbar basınçta elde edilen deşarjın spektral çizgilerinin şiddetleri maksimum olarak ortaya çıkmıştır. Her iki deşarj bölgesi için uyarılma ve elektron sıcaklıkları matematiksel modeller ile tahmin edilmiştir.

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An investigation of the spectral lines of argon discharge with Low electron density

Şahi̇n

2019

Optik

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Optical and electrical properties of capacitive coupled radio frequency Ar-H2 mixture discharge at the low pressure

Cited by 8 publications

References 26 publications

Discharge characteristic of very high frequency capacitively coupled argon plasma*

Discharge characteristic of very high frequency capacitively coupled argon plasma*

The Properties of Inductive Coupled Radio-Frequency Neon Flowing Discharge at Low-Pressure

An investigation of the spectral lines of argon discharge with Low electron density

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