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In this study, the electrical and optical properties and plasma's parameters of capacitive radio frequency (RF) discharge for the argon and hydrogen mixture at low pressure are investigated using optical emission spectroscopy (OES) and a Langmuir probe. The wavelengths of spectral lines obtained from OES are between 400 and 950 nm. By using the spectral lines and probe data, the electron temperature for every different RF power, mixture rate and flow rate are determined by the modified Boltzmann curve method. The Langmuir probe gives the electron temperature and other plasma properties for the same discharge parameters.

In this study, the characteristic properties and plasma parameters of capacitive radio frequency (RF) argon (Ar) discharge and supplementary discharge at low pressure are investigated with optical emission spectroscopy (OES). The wavelengths of spectral lines from OES are obtained between 650–900 nm. Using OES lines and related experimental data, the electron temperatures for different RF power, flow, and measurement periods are determined. Eventually, the properties of plasma including the electron temperature are identified. In addition, the numerical modelling of the discharge parameters is carried out by using the “extended” fluid model for plasma, and consistency between numerical and experimental results is discussed.