Spectroscopic study and numerical simulation of low-pressure radio-frequency capacitive discharge with argon downstream

Abstract

In this study, the characteristic properties and plasma parameters of capacitive radio frequency (RF) argon (Ar) discharge and supplementary discharge at low pressure are investigated with optical emission spectroscopy (OES). The wavelengths of spectral lines from OES are obtained between 650–900 nm. Using OES lines and related experimental data, the electron temperatures for different RF power, flow, and measurement periods are determined. Eventually, the properties of plasma including the electron temperature are identified. In addition, the numerical modelling of the discharge parameters is carried out by using the “extended” fluid model for plasma, and consistency between numerical and experimental results is discussed.

Optical Emission Spectroscopic (OES) analysis for diagnostics of electron density and temperature in non-equilibrium argon plasma based on collisional-radiative model

“…Red open squares are those measured with the scheme described in section 3.2, with two intensity ratios of (687. b 1j is a parameter of the level j determined with the energy E j and electron collisional cross section (or rate coefficient) from level 1 to j. After the proposal of this data fitting procedure, several papers reported that the electron temperature determined with the OES measurement was improved in its accuracy [85,86]. However, as was stated at the end of Section 2.2, if the corona model does not hold and the cumulative excitation is dominant for rather highelectron density plasmas, the modified Boltzmann plot method, or Equation 15, cannot be applied to the real OES analysis.…”

Evaluating plasma fluctuation by collisional-radiative model using Malliavin derivative

“…There exists a graphical method proposed to derive electron temperature and excited-level populations using a modified Boltzmann plot in the Corona-phase region. [29][30][31] However, for plasmas where the corona model is not applicable and cumulative excitation prevails in relatively high electron density scenarios, these methods might not be viable. 32) Our proposed method could potentially apply to such plasmas.…”

Numerical simulation of magnetization induction coupled discharge plasma discharge process

“…When partially ionized gas leaves the discharge zone, it creates a low-velocity plasma jet with a median temperature of 8000-10,000 K [8][9]. Dielectric blocking discharges can produce high-density, nonequilibrium, low-temperature plasma, which has promising applications in flow control [10][11]. The in-depth study of the plasma discharge of dielectric barrier discharge to further optimize and improve the effectiveness and efficiency of the exciter must be based on an in-depth sympathetic of the dynamics of the plasma reaction instrument and, therefore, the establishment of the plasma discharge model and the coupling study of the discharge and the flow field flow is necessary [12][13].…”