Optical Beam Induced Current Techniques for Failure Analysis   of Very Large Scale Integrated Circuits Devices

Komoda, Hirotaka; Shimizu, K.

doi:10.1143/jjap.33.3393

Cited by 13 publications

(3 citation statements)

References 1 publication

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“…It may be noted that a number of studies have been carried out to explore the capability of OBIC microscopy for rapid identification of internal fail locations and defect sites in semiconductor ICs, including photodiodes, semiconductor lasers and CMOS devices (Grasso et al, 1989; Komoda & Shimizu, 1994; Mitsuhashi et al, 1992; Takasu, 2001). Chin et al, introduced Single Contact Optical Beam Induced Currents (SCOBIC) as a novel failure analysis technique to image multiple junctions of all transistors in an IC (both bipolar and sub‐micron CMOS devices) simply by connecting to a point common to all transistors (Chin et al, n.d.; Chin et al, 2001).…”

Section: Microscopic Measurements Of Obicmentioning

confidence: 99%

An insight into optical beam induced current microscopy: Concepts and applications

Zhuo

Banik

Kao

et al. 2022

Microscopy Res & Technique

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Laser scanning optical beam induced current (OBIC) microscopy has become a powerful and nondestructive alternative to other complicated methods like electron beam induced current (EBIC) microscopy, for high resolution defect analysis of electronic devices. OBIC is based on the generation of electron–hole pairs in the sample due to the raster scanning of a focused laser beam with energy equal or greater than the band gap energy and synchronized detection of resultant current profile with respect to the beam positions. OBIC is particularly suitable to localize defect sites caused by metal–semiconductor interdiffusion or electrostatic discharge (ESD). OBIC signals, thus, are capable of revealing the parameters/factors directly related to the reliability and efficiency of the electronic device under test (DUT). In this review, the basic principles of OBIC microscopy strategies and their notable applications in semiconductor device characterization are elucidated. An overview on the developments of OBIC microscopy is also presented. Specifically, the recent progresses on the following three OBIC measurement strategies have been reviewed, which include continuous laser based single photon OBIC, pulsed laser based single photon OBIC, and multiphoton OBIC microscopy for three‐dimensional mapping of photocurrent response of electronic devices at high spatiotemporal resolution. Challenges and future prospects of OBIC in characterizing complex electronic devices are also discussed. Highlights Characterization of electronic device quality is of paramount importance. Optical beam induced current (OBIC) microscopy offers spatially resolved mapping of local electronic properties. This review presents the principle and notable applications of OBIC microscopy.

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Section: Microscopic Measurements Of Obicmentioning

confidence: 99%

An insight into optical beam induced current microscopy: Concepts and applications

Zhuo

Banik

Kao

et al. 2022

Microscopy Res & Technique

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show abstract

“…For instance, the very short temporal width of ultrafast laser pulses enables generation of very high frequency current on fast photo-detectors [12]. Through these unique capabilities we introduces the novel method of optical beam induced current (OBIC) [13][14][15][16][17] that is used to map the frequency transfer properties of optically active electronic devices. This technique is based on and is hence termed radio frequency (RF) OBIC [12].…”

Section: Introductionmentioning

confidence: 99%

Laser scanning microscopy as a versatile platform: imaging based on nonlinear and ultrafast effects

Kao

2005

SPIE Proceedings

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The nature of scanning image acquisition greatly facilitates incorporation of various contrast signals for imaging and integration with techniques in signal processing. In this study, we are reporting imaging modalities and techniques based on nonlinear optical and ultrafast effects that are excited by ultrafast laser. Additionally, the use of signal processing electronics allows signal conditioning techniques, such as dithering, lock-in detection,Ö etc, to be employed so that better signal to noise ratio can be resulted and special features in imaging can be emphasized.

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“…[1][2][3][4] In combination with confocal reflected-light imaging, a variety of failure modes can be identified nondestructively by OBIC. However, front surface OBIC is limited by nonuniform light transmission through the multiple levels of metallic interconnects and power distribution planes used in modern IC technology.…”

Section: Introductionmentioning

confidence: 99%

Comparison of one- and two-photon optical beam-induced current imaging

Xu¹,

Denk²

1999

Journal of Applied Physics

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Optical beam induced current (OBIC) imaging through the backside of integrated circuits was investigated in the wavelength λ region from 1.15 to 1.26 μm. With a subpicosecond excitation source and approximately 1 mW at the sample, the two-photon contribution to the generated photocurrent dominates at λ=1.25 μm but becomes negligible for λ<1.18 μm. One-photon- (1P-) and two-photon- (2P-) OBIC images are very different. In the 1P case a strong contribution by scattered light to the carrier generation leads to an edge enhancement effect that is entirely missing when 2P excitation dominates. 2P-OBIC images often show supply-voltage dependent intensity steps that are much sharper than the optical resolution permits. The advantages of 2P-OBIC lie in the spatial confinement of the free carrier generation, a more relevant contrast mechanism, and the promise of a substantial increase in spatial resolution because of the quadratic intensity dependence and the possibility of using silicon solid immersion lenses, which could eventually provide resolution sufficient for circuits made by deep UV lithography.

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Optical Beam Induced Current Techniques for Failure Analysis of Very Large Scale Integrated Circuits Devices

Cited by 13 publications

References 1 publication

An insight into optical beam induced current microscopy: Concepts and applications

An insight into optical beam induced current microscopy: Concepts and applications

Laser scanning microscopy as a versatile platform: imaging based on nonlinear and ultrafast effects

Comparison of one- and two-photon optical beam-induced current imaging

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