Optical Characterization of High-Order 1-D Silicon Photonic Crystals

Barillaro, Giuseppe; Strambini, Lucanos Marsilio; Annovazzi-Lodi, V.; Merlo, S.

doi:10.1109/jstqe.2009.2017278

Cited by 43 publications

(44 citation statements)

References 24 publications

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“…Technological deficiencies resulting in side-wall roughness in 1D PCs were investigated in Refs. [6][7][8][9][10], whereas in Refs. [6,8,11,12], non-uniformities in wall thickness were analysed.…”

Section: Introductionmentioning

confidence: 99%

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Influence of Fluctuations of the Geometrical Parameters on the Photonic Band Gaps in One-Dimensional Photonic Crystals

Tolmachev¹,

Baldycheva²,

Berwick³

et al. 2012

PIER

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Abstract-The influence of random fluctuations in the layer thicknesses in high contrast, one-dimensional Photonic Crystals (PCs) on the transmission spectra and Photonic Band Gaps (PBGs) is investigated. The change in the PBGs depends on the magnitude of the fluctuations and increases with an increase in the order of the PBG. Introducing thickness non-uniformity into the PC of up to 0.004 times the value of lattice constant for different types of fluctuation distributions has a negligible effect on either the position or the shape of the 1st and nearest PBGs. The approach suggested here allows the determination of the tolerances required in the geometrical parameters of PCs during fabrication. It also allows the optimisation of PC structures using high order PBGs.

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Section: Introductionmentioning

confidence: 99%

“…These have been investigated in Refs. [10,15], for example. Utilisation of secondary, and higher order, PBGs allow further applications of 1D PCs, including Fabry-Pérot optical filters with tunable resonance peaks of high-order [16], or the formation of wide-band windows of transparency in Si [17].…”

Section: Introductionmentioning

confidence: 99%

Influence of Fluctuations of the Geometrical Parameters on the Photonic Band Gaps in One-Dimensional Photonic Crystals

Tolmachev¹,

Baldycheva²,

Berwick³

et al. 2012

PIER

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“…The optical measuring setup incorporates standard telecommunication single-mode optical fibres (SMR-28 9/125/250 lm core/cladding/coating diameter) (Barillaro et al 2009b). Radiation from a white light source emitting in the selected wavelength range is launched into one port of a 50/50% coupler and shined onto the front face of the PhC.…”

Section: Evaluation Of Functionalitymentioning

confidence: 99%

“…Experimental reflectivity spectra are obtained by normalizing measured power spectra with respect to an ideal reflector, as described by Barillaro et al (2009b). Typical experimental reflectivity spectra for the three tested liquids Fig.…”

Section: Evaluation Of Functionalitymentioning

confidence: 99%

Integrated optofluidic microsystem based on vertical high-order one-dimensional silicon photonic crystals

Barillaro

Merlo

Surdo

et al. 2011

Microfluid Nanofluid

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In this work, fabrication and testing of an optofluidic microsystem exploiting high aspect-ratio, vertical, silicon/air one-dimensional (1D) photonic crystals (PhC) are reported. The microsystem is composed of an electrochemically micromachined silicon substrate integrating a 1D PhC featuring high-order bandgaps in the near-infrared region, bonded to a glass cover provided with inlet/outlet holes for liquid injection/extraction in/out the PhC-itself. Wavelength shifts of the reflectivity spectrum of the photonic crystal, in the range 1.0-1.7 lm, induced by flow of different liquids through the PhC air gaps are successfully measured using an in-plane all-fibre setup, thanks to the PhC high aspect-ratio value. Experimental results well agree with theoretical predictions and highlight the good linearity and high sensitivity of such an optofluidic microsystem in measuring refractive index changes. The sensitivity value is estimated to be 1,049 nm/RIU around 1.55 lm, which is among the highest reported in the literature for integrated refractive index sensors, and explained in terms of enhanced interaction between light and liquid within the PhC.

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“…15,16 However, Si is not transparent in the visible wavelength region. Therefore, 1D PhCs made of TiO 2 and Al 2 O 3 are desirable candidates for applications in the visible and near-infrared regimes.…”

Section: Introductionmentioning

confidence: 99%

Fabrication of high aspect ratio TiO2 and Al2O3 nanogratings by atomic layer deposition

Shkondin¹,

Takayama²,

Lindhard³

et al. 2016

Journal of Vacuum Science &Amp; Technology A: Vacuum, Surfaces, and Films

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Articles you may be interested inThe authors report on the fabrication of TiO 2 and Al 2 O 3 nanostructured gratings with an aspect ratio of up to 50. The gratings were made by a combination of atomic layer deposition (ALD) and dry etch techniques. The workflow included fabrication of a Si template using deep reactive ion etching followed by ALD of TiO 2 or Al 2 O 3 . Then, the template was etched away using SF 6 in an inductively coupled plasma tool, which resulted in the formation of isolated ALD coatings, thereby achieving high aspect ratio grating structures. SF 6 plasma removes silicon selectively without any observable influence on TiO 2 or Al 2 O 3 , thus revealing high selectivity throughout the fabrication. Scanning electron microscopy was used to analyze every fabrication step. Due to nonreleased stress in the ALD coatings, the top parts of the gratings were observed to bend inward as the Si template was removed, thus resulting in a gradual change in the pitch value of the structures. The pitch on top of the gratings is 400 nm, and it gradually reduces to 200 nm at the bottom. The form of the bending can be reshaped by Ar þ ion beam etching. The chemical purity of the ALD grown materials was analyzed by x-ray photoelectron spectroscopy. The approach presented opens the possibility to fabricate high quality optical metamaterials and functional nanostructures.

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Optical Characterization of High-Order 1-D Silicon Photonic Crystals

Cited by 43 publications

References 24 publications

Influence of Fluctuations of the Geometrical Parameters on the Photonic Band Gaps in One-Dimensional Photonic Crystals

Influence of Fluctuations of the Geometrical Parameters on the Photonic Band Gaps in One-Dimensional Photonic Crystals

Integrated optofluidic microsystem based on vertical high-order one-dimensional silicon photonic crystals

Fabrication of high aspect ratio TiO2 and Al2O3 nanogratings by atomic layer deposition

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