Optical characterization of PZT thin films for waveguide applications

Abstract

In order to develop an electro-optic waveguide, Pb(Zr, Ti)O3 ceramic ferroelectric thin films were elaborated by a modified sol-gel process on glass substrate. In the aim to study the optical properties of the PZT films, an accurate refractive index and thickness measurement apparatus was set up, which is called M-lines device. An evaluation of experimental uncertainty and calculation of the precision of the refractive index and thickness were developed on PZT layers. Two different processes of PZT elaboration were made and studied with this apparatus. The reproducibility of one fabrication process was tested and results are presented in this paper

Effect of thickness on dielectric, ferroelectric, and optical properties of Ni substituted Pb(Zr0.2Ti0.8)O3 thin films

“…42,43 The calculated values of n were in the range of 2.17-2.43 and 2.11-2.34 for 200 and 400 nm respectively, similar to the values found for PZT thin films. [43][44][45][46] The computed values of k were found in the range of 0.04-0.053 and 0.015-0.018 for 200 and 400 nm, respectively, which are comparable with the k value reported earlier for PZT thin films. 43,45,47 The n-values for both films decrease exponentially as the wavelength increases, which is consistent with previously reported behavior of PZT thin films.…”

Determination of refractive index, thickness, and the optical losses of thin films from prism-film coupling measurements

“…Measurements were performed with two different kinds of m-lines setups at 632:8 nm and in TE mode: one commercial setup from Metricon Corporation [17] in transmission configuration (see Fig. 1(a)) and one homemade setup in reflection configuration [18] (see Fig. 1(b)).…”

A method to retrieve optical and geometrical characteristics of three layer waveguides from m-lines measurements

“…A layer of PZT was spin-coated individually on samples A ℓ , A r , B ℓ and B r . After cristallisation, we expect a repeatability of 8 × 10 −3 on the refractive index and of 20 nm on the thickness [18].…”

“…It is slightly higher than the refractive index of the PZT deposited on glass under the same conditions [18]. This may be due to a structural change of the PZT thin film induced by the Number of events Error on n 2…”

“…For symmetry reasons, we expect ZnO layers A ℓ and A r as well as B ℓ and B r , to be identical. The PZT 36/64 layers were elaborated by Chemical Solution Deposition technique [18].…”