Optical constants of magnetron sputtered Pt thin films with improved accuracy in the N- and O-electronic shell absorption regions

Abstract

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Determination of optical constants of thin films in the EUV

“…Pauly et al used reflection electron energy loss spectroscopy on Mo to determine the dielectric constants [31] and determined a value that is also very close to our value. The data set of Soufli et al on Pt [33], who used transmission type measurements on thin, freestanding films, agrees remarkably well with our data. Differences are smaller than 0.5 % over the entire spectral range, including the visible absorption edges N 6 and N 7 (not shown).…”

“…When comparing our data at 91.85 eV to the existing literature of direct measurements of the optical constants [30,31,32,33,34,35,36], we find the differences in values, that are summarized in figure 4 alongside those, calculated from atomic scattering factors [10,37,38]. Of those references, the data of Windt et al on Mo, Pt, Ru, and Ta [30], as well as the data of Rodríguez-de Marcos et al on Te [36], Hosoya et al on Ta [35] were obtained from reflection type measurements and are therefore very comparable to ours with respect to methodology and outcome.…”

Optical constants of sputtered beryllium thin films determined from photoabsorption measurements in the spectral range 20.4–250 eV

“…The following datasets were used: in the range 0.02-4.2 eV, data were drawn from Rakić et al (1998) and Polyanskiy (undated), calculated using the Lorentz-Drude model; for 4.2-20.4 eV, data were drawn from Palik (1991); for 20.4-250 eV, the data obtained in the present work were used; for 250-5950 eV, data from CXRO were used; and for 5950-432945 eV, data from Chantler et al (undated) were used. These sources were also used by Delmotte et al (2018) to obtain the optical constants for Cr and by Soufli et al (2019) for Pt. The combined curve is shown in Fig.…”

“…In this paper, we followed the methodology developed in the works of Delmotte et al (2018) and Soufli et al (2019). The thicknesses of the films and oxide layers were determined by EUV reflectometry and checked by transmission modeling.…”

X-ray reflectometry of a platinum coating as reference sample for the ATHENA coating development

“…The design of the Pt thin film is based on X-ray reflectivity simulations of various film thicknesses and roughness parameters which are related to the number and amplitude of Kiessig fringes, respectively. In the simulations, the surface roughness of the Pt film was fixed to 0.5 nm based on the roughness value reported in Soufli et al 9 . A simulation of the selected design of 30 nm Pt thin film is presented in Figure 1a.…”