Sulfur incorporated nanocrystalline carbon (n-C:S) thin films grown on molybdenum substrates by hot-filament chemical vapor deposition (HFCVD) using gas mixtures of methane, hydrogen and a range of hydrogen sulfide (H 2 S) concentrations are optically examined using Raman spectroscopy (RS) and ex situ spectroscopic phase modulated ellipsometry (SPME) from near IR to near UV (1.5-5.0 eV) obtaining their vibrational frequencies and pseudodielectric function, respectively. The ellipsometry data (, ) were modeled using Bruggeman effective-medium theory (BEMT) and five parameters Forouhi and Bloomer (FB) dispersion Model. A simplified two-layer model consisting of a top layer comprising an aggregate mixture of sp 3 C+sp 2 C+void and a bulk layer (L 2 ), defined as a dense amorphized FB-modeled material was found to simulate the data reasonably well. Through these simulations, it was possible to estimate the dielectric function of our n-C: S material, along with the optical bandgap (Eg), film thickness (d), and roughness layer (a) as a function of [H 2 S]. The physical interpretation(s) of the modeling parameters obtained were discussed. The Raman and ellipsometry results indicate that the average size of nanocrystallites in the sulfur-incorporated carbon thin films becomes smaller with increasing H 2 S concentration, consistent with AFM measurements. The bandgap was found to decrease systematically with increasing H 2 S concentration, indicating the 2 enhancement of midgap states and sp C network, in agreement with RS results. These results are compared to those obtained for the films grown without sulfur (n-C), in order to study the influence of sulfur addition to the CVD process. This analysis led to a correlation between the film microstructure and its electronic properties.
INTRODUCTIONA great deal of attention has been given to diamond and diamond-like carbon (DLC) thin films since their advent owing to a wide range of desired and unique mechanical, optical and electronic properties (such as: high mechanical hardness, chemical inertness, negative electron affinity, and very high electron and hole mobilities) [1,2]. This combination of superlative properties paves their way to several potential and technological applications: optical coatings, wide-band IR transmissive windows, and flat panel displays (FPDs) to name a few [3]. It is also well known that the optical and electronic properties of these carbon materials are controlled by the ratio of sp