Optical emission characteristics of ablation plasma plumes during the laser-etching process of CdTe

Abe, Kôji; Eryu, Osamu; Nakashima, S.; Terai, Masayoshi; Kubo, Makoto; Niraula, M.; Yasuda, K.

doi:10.1007/s11664-005-0201-7

Cited by 7 publications

(5 citation statements)

References 11 publications

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“…We believe that this factor is the component volatility. Due to different component volatilities, the laser ablation of multicomponent targets affects the target stoichiometry, since the more volatile components are released (evaporated) more efficiently than the less volatile ones [70–72] . Furthermore, this can strongly affect the expansion dynamics of the ablation plume [72–74] …”

Section: Resultsmentioning

confidence: 99%

“…Due to different component volatilities, the laser ablation of multicomponent targets affects the target stoichiometry, since the more volatile components are released (evaporated) more efficiently than the less volatile ones. [70][71][72] Furthermore, this can strongly affect the expansion dynamics of the ablation plume. [72][73][74] The relative volatility of the CoCrFeMnNi HEA components can be estimated based on the vapor pressure and boiling point of the corresponding materials (Table.…”

Section: Mass Spectrometric Studies Of the Hea Ablation Plumesmentioning

confidence: 99%

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Synthesis of High Entropy Alloy Nanoparticles by Pulsed Laser Ablation in Liquids: Influence of Target Preparation on Stoichiometry and Productivity

Tahir,

Shkodich,

Eggert

et al. 2024

ChemNanoMat

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High entropy alloys (HEAs) have a wide range of applications across various fields, including structural engineering, biomedical science, catalysis, magnetism, and nuclear technology. Nanoscale HEA particles show promising catalytic properties. Nevertheless, attaining versatile composition control in nanoparticles poses a persistent challenge. This study proposes the use of pulsed laser ablation in liquids (PLAL) for synthesizing nanoparticles using equiatomic CoCrFeMnNi targets with varied preparation methods. We evaluate the impact of target preparation method on nanoparticle yield and composition as well as the magnetic properties of the nanoparticles. The elemental powder‐pressed heat‐treated target (HEA‐PP), identified as the most time‐efficient and cost‐effective, exhibits noticeable segregation and non‐uniform elemental distribution compared to ball milled hot‐pressed powder (HEA‐BP) and face‐centered cubic (FCC) single crystal (HEA‐SX) alloy targets. From all targets, nanoparticles (sizes from 2 to 120 nm) can be produced in ethanol with a nearly equiatomic CoCrFeMnNi composition and a FCC structure, showing oxidation of up to 20 at.%. Nanoparticles from HEA‐PP exist in a solid solution state, while those from HEA‐BP and HEA‐SX form core‐shell structures with a Mn shell due to inhomogeneous material expulsion, confirmed by mass spectrometry. HEA‐PP PLAL synthesis demonstrates 6.8 % and 15.1 % higher productivity compared to HEA‐BP and HEA‐SX, establishing PLAL of elemental powder‐pressed targets as a reliable, time‐efficient, and cost‐effective method for generating solid solution HEA nanoparticles.

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Section: Resultsmentioning

confidence: 99%

Section: Mass Spectrometric Studies Of the Hea Ablation Plumesmentioning

confidence: 99%

Synthesis of High Entropy Alloy Nanoparticles by Pulsed Laser Ablation in Liquids: Influence of Target Preparation on Stoichiometry and Productivity

Tahir,

Shkodich,

Eggert

et al. 2024

ChemNanoMat

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“…However, the etching rate was slowed and varied from 80 nm per pulse to 100 nm per pulse in the higher energy region from 0.4 J/cm 2 to 1.2 J/cm 2 . 13 The SEM image of deep trenches formed on the (211) CdTe wafer is shown in Fig. 1b.…”

Section: Resultsmentioning

confidence: 99%

Excimer Laser Etching Process of CdTe Crystals for Formation of Deep Vertical Trenches

Yasuda

Niraula

Nakamura

et al. 2007

Journal of Elec Materi

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Deep isolation trenches with high aspect ratio were formed on CdTe crystals using the excimer laser etching technique. Vertical trenches 80-lm deep and 55-lm wide were formed in 5 min by irradiating a laser on the CdTe crystal through a contact-type metal mask in vacuum. Surface chemistry of the laserirradiated CdTe crystal was examined by Auger electron spectroscopy (AES), scanning electron microscopy (SEM), and photoluminescence (PL) to determine the extent of laser-induced damage. It was found that the damaged layer remains confined to the thin surface layer in the submicron range, which could be easily removed by a light Br-methanol etch.

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“…to the surface of parts, which allows you to restore geometry, increase surface strength and corrosion resistance, etc. [1][2][3][4][5][6][7][8][9][10]. In this work we consider mass and heat transfer in the reaction chamber during the growth of an epitaxial layer using pulsed laser deposition.…”

Section: Introductionmentioning

confidence: 99%

An Analytical Approach for Analyzing Film Growth by Pulsed Laser Deposition. Analysis of the Influence of Parameters

Pankratov

2021

Preprint

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Optical emission characteristics of ablation plasma plumes during the laser-etching process of CdTe

Cited by 7 publications

References 11 publications

Synthesis of High Entropy Alloy Nanoparticles by Pulsed Laser Ablation in Liquids: Influence of Target Preparation on Stoichiometry and Productivity

Synthesis of High Entropy Alloy Nanoparticles by Pulsed Laser Ablation in Liquids: Influence of Target Preparation on Stoichiometry and Productivity

Excimer Laser Etching Process of CdTe Crystals for Formation of Deep Vertical Trenches

An Analytical Approach for Analyzing Film Growth by Pulsed Laser Deposition. Analysis of the Influence of Parameters

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