2007
DOI: 10.1016/j.jqsrt.2007.02.008
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Optical emission spectroscopy of Ar–N2 mixture plasma

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Cited by 100 publications
(40 citation statements)
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“…During ammonia microwave plasma treatment process, the content of various radicals are affected obviously by the input microwave power. When the microwave power is too high, the main radical in NH 3 plasma is ·N or ·N 2 radicals [20] , which is useless to form amine group on the diamond surface [21,22] . To form enough ·NH and/or ·NH 2 radicals, it is necessary to optimize the input microwave power.…”
Section: Modification Mechanismmentioning
confidence: 99%
“…During ammonia microwave plasma treatment process, the content of various radicals are affected obviously by the input microwave power. When the microwave power is too high, the main radical in NH 3 plasma is ·N or ·N 2 radicals [20] , which is useless to form amine group on the diamond surface [21,22] . To form enough ·NH and/or ·NH 2 radicals, it is necessary to optimize the input microwave power.…”
Section: Modification Mechanismmentioning
confidence: 99%
“…Therefore, if argon is added to the nitrogen plasma, the emission intensities are significantly increased, and consequently the concentration of the active species can be observed. This is expected based on the Penning effect, as follows [4]:…”
Section: Methodsmentioning
confidence: 78%
“…29 The N * 2 emission lines mainly consisted of the radiative state (C 3 Q u / B 3 Q g ) and the metastable state (B 3 Q u + / A 3 P u + ). 29 The N * 2 emission lines mainly consisted of the radiative state (C 3 Q u / B 3 Q g ) and the metastable state (B 3 Q u + / A 3 P u + ).…”
Section: Resultsmentioning
confidence: 97%