Optical heterodyne grating interferometry for displacement measurement with subnanometric resolution

Lee, Ju Yi; Chen, Hui Yi; Hsu, Cheng Chih; Wu, Chao-Hsin

doi:10.1016/j.sna.2007.02.017

Cited by 77 publications

(38 citation statements)

References 17 publications

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“…The highest resolution optical encoders operate on the principle of interference [74,75]. The technique involves light that is diffracted through a transparent phase grating in the read-head and reflected from a step grating on the scale [74].…”

Section: Linear Encodersmentioning

confidence: 99%

Position Sensors for Nanopositioning

Fleming

Leang

2016

Nanopositioning Technologies

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Position sensors with nanometer resolution are a key component of many precision imaging and fabrication machines. Since the sensor characteristics can define the linearity, resolution, and speed of the machine, the sensor performance is a foremost consideration. The first goal of this article is to define concise performance metrics and to provide exact and approximate expressions for error sources including nonlinearity, drift, and noise. The second goal is to review current position sensor technologies and to compare their performance. The sensors considered include: resistive, piezoelectric, and piezoresistive strain sensors; capacitive sensors; electrothermal sensors; eddy-current sensors; linear variable displacement transformers; interferometers; and linear encoders.

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Section: Linear Encodersmentioning

confidence: 99%

Position Sensors for Nanopositioning

Fleming

Leang

2016

Nanopositioning Technologies

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“…The highest resolution optical encoders operate on the principle of interference [86]. Light is diffracted through a transparent phase grating in the read head and reflected from a step grating on the scale.…”

Section: Optical Encodersmentioning

confidence: 99%

Displacement Measurement

Leach¹

2014

Fundamental Principles of Engineering Nanometrology

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“…To achieve the high resolution positioning, the sensing methods of position sensor become more important and have attracted great attention over the past two decades. In this section, we will introduce a few of typical precision positioning methods [24][25][26][27][28][29][30] which used heterodyne interferometry. C. C. Hsu [29] proposed the grating heterodyne interferometry (GHI) to measure the inplane displacement.…”

Section: Accurate Positioning With Heterodyne Interferometermentioning

confidence: 99%