Physics, Chemistry and Application of Nanostructures 2017
DOI: 10.1142/9789813224537_0111
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Optical Interconnects Between Silicon Chips Based on Light-Emitting Diodes on Nanostructured Silicon

Abstract: Design and manufacturing technology of optical interconnects between silicon chips have been developed. Structures based on nanosize silicon clusters embedded in an alumina matrix are used as light-emitting diodes and photodetectors. The silicon microchannel plate vias are used as light-guiding channels. An experimental structure is fabricated and characterized with the current conversion efficiency of 0.3%.

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