We have developed a range of theoretical and numerical techniques for modeling the multi-mode, 210-34 µm, ultra-low-noise Transition Edge Sensors that will be used on the SAFARI instrument on the ESA/JAXA cooled-aperture FIR space telescope SPICA. The models include a detailed analysis of the resistive and reactive properties of thin superconducting absorbing films, and a partially coherent mode-matching analysis of patterned films in multi-mode waveguide. The technique allows the natural optical modes, modal responsivities, and Stokes maps of complicated structures comprising patterned films in profiled waveguides and cavities to be determined.